CMOS-compatible titanium dioxide deposition for athermalization of silicon photonic waveguides

2013 Conference on Lasers and Electro-Optics, CLEO 2013

Volumn , Issue , 2013, Pages

  Shang, Kuanping ^a   Djordjevic, Stevan S ^a   Li, Jun ^a   Liao, Ling ^b   Basak, Juthika ^b   Liu, Hai Feng ^b   Yoo, S J B ^a  

^a University of California Davis   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; OPTICAL WAVEGUIDES; OXIDES; PHOTONIC DEVICES; TITANIUM DIOXIDE;

ATHERMALIZATION; CMOS COMPATIBLE; MATERIAL DEVELOPMENT; PHOTONIC COMPONENTS; PHOTONIC WAVEGUIDES; RING MODULATORS;

SILICON PHOTONICS;

EID: 84903782245     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1364/cleo_si.2013.cf2i.5     Document Type: Conference Paper

References (6)

1. Raghunathan, V., et al., Athermal operation of Silicon waveguides: spectral, second order and footprint dependencies. Opt. Express, 2010. 18(17): p. 17631-17639.
2. Zhou, L., et al., Towards athermal optically-interconnected computing system using slotted silicon microring resonators and RF-photonic comb generation. Applied Physics A, 2009. 95(4): p. 1101-1109.
3. Guha, B., B. B. C. Kyotoku, and M. Lipson, CMOS-compatible athermal silicon microring resonators. Opt. Express, 2010. 18(4): p. 3487-3493.
4. Decker, C. and K. Zahouily, Photostabilization of polymeric materials by photoset acrylate coatings. Radiation Physics and Chemistry, 2002. 63(1): p. 3-8.
5. Martin, N., et al., Microstructure modification of amorphous titanium oxide thin films during annealing treatment. Thin Solid Films, 1997. 300(1-2): p. 113-121.
6. Evans, C. C., et al. Submicrometer-width TiO2 waveguides. 2012. Optical Society of America. This work was supported in part under an Intel University Research Office (URO) project on silicon photonics.