Athermalizing and trimming of slotted silicon microring resonators with UV-sensitive PMMA upper-cladding

IEEE Photonics Technology Letters

Volumn 21, Issue 17, 2009, Pages 1175-1177

  Zhou, Linjie ^a   Okamoto, Katsunari ^a   Yoo, S J B ^a  

^a University of California   (United States)

Author keywords

Integrated photonic devices; Microring resonators; Silicon photonics; Slotted waveguides; Wavelength division multiplexing

Indexed keywords

COMPUTING SYSTEM; INTEGRATED PHOTONIC DEVICES; MICRORING RESONATOR; MICRORING RESONATORS; MULTIWAVELENGTH; OPTICAL COMPONENTS; POLY-METHYL METHACRYLATES; RESONANCE TEMPERATURE; RESONANCE WAVELENGTHS; SILICON PHOTONICS; SLOT WIDTH; SLOTTED WAVEGUIDES; TEMPERATURE DEPENDENCE; THERMAL SENSITIVITY; ULTRA-VIOLET; UV LIGHT;

APPLICATION SPECIFIC INTEGRATED CIRCUITS; CLADDING (COATING); LIGHT TRANSMISSION; PHOTONIC DEVICES; RECTANGULAR WAVEGUIDES; RESONANCE; TEMPERATURE DISTRIBUTION; TRIMMING; WAVELENGTH DIVISION MULTIPLEXING;

OPTICAL RESONATORS;

EID: 67149126075     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2009.2023522     Document Type: Article

References (12)

1. D. A. B. Miller, "Rationale and challenges for optical interconnects to electronic chips," Proc. IEEE, vol. 88, no. 6, pp. 728-749, Jun. 2000.
2. L. Pavesi and D. J. Lockwood, Silicon Photonics. New York: Springer-Verlag, 2004.
3. R. Soref, "The past, present, and future of silicon photonics," IEEE J. Sel. Topics Quantum Electron., vol. 12, no. 6, pt. 2, pp. 1678-1687, Nov./Dec. 2006.
4. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-ootic modulator," Nature (London), vol. 435, pp. 325-327, 2005.
5. H. Ng, M. R. Wang, D. Li, X. Wang, J. Martinez, R. R. Panepucci, and K. Pathak, "1 × 4 wavelength reconfigurable photonic switch using thermally tuned microring resonators fabricated on silicon substrate," IEEE Photon. Technol. Lett., vol. 19, no. 9, pp. 704-706, May 1, 2007.
6. V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, "Guiding and confining light in void nanostructure," Opt. Lett., vol. 29, pp. 1209-1211, 2004.
7. Q. Xu, V. R. Almeida, R. R. Panepucci, and M. Lipson, "Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material," Opt. Lett., vol. 29, pp. 1626-1628, 2004.
8. S. T. Chu, W. Pan, S. Suzuki, B. E. Little, S. Sato, and Y. Kokubun, "Temperature insensitive vertically coupled microring resonatoradd/drop filters by means of a polymer overlay," IEEE Photon. Technol. Lett. vol. 11, no. 9, pp. 1138-1140, Sep. 1999.
9. J. Lee, D. Kim, H. Ahn, S. Park, and G. Kim, "Temperature dependence of silicon nanophotonic ring resonator with a polymeric overlayer," J. Lightw. Technol., vol. 25, no. 8, pp. 2236-2243, Aug. 2007.
10. K. Kashiwagi, S. Yamashita, K. Okamoto, and S. J. B. Yoo, "The slot material investigation for temperature insensitive silicon slot waveguides," in Proc. Eur. Conf. Integrated Optics, Eindhoven, The Netherlands, 2008.
11. N. N. Feng, R. Sun, L. C. Kimerling, and J. Michel, "Lossless strip-to-slot waveguide transformer," Opt. Lett., vol. 32, pp. 1250-1252, 2007.
12. V. R. Almeida, R. R. Panepucci, and M. Lipson, "Nanotaper for compact mode conversion," Opt. Lett., vol. 28, pp. 1302-1304, 2003.