Athermal silicon ring modulators clad with titanium dioxide by RF magnetron sputtering

2013 Optical Interconnects Conference, OI 2013

Volumn , Issue , 2013, Pages 56-57

  Djordjevic, Stevan S ^a   Shang, Kuanping ^a   Guan, Binbin ^a   Cheung, Stanley T S ^a   Qin, Chuan ^a   Liao, Ling ^b   Basak, Juthika ^b   Liu, Hai Feng ^b   Yoo, S J B ^a  

^a University of California Davis   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

Athermal; Modulator; Ring; Titanium dioxide

Indexed keywords

ATHERMAL; CURRENT INJECTIONS; INTENSITY MODULATIONS; RF-MAGNETRON SPUTTERING; SILICON RING;

MAGNETRON SPUTTERING; MODULATORS; OPTICAL INTERCONNECTS; OXIDES; RINGS (COMPONENTS); SILICON; TITANIUM DIOXIDE;

AMORPHOUS SILICON;

EID: 84882931651     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OIC.2013.6552921     Document Type: Conference Paper

References (6)

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