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Volumn 24, Issue 27, 2013, Pages

A new bottom-up methodology to produce silicon layers with a closed porosity nanostructure and reduced refractive index

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION POWER; ELLIPSOMETRY MEASUREMENTS; FLEXIBLE MATERIALS; OBLIQUE-ANGLE DEPOSITION; RUTHERFORD BACK-SCATTERING; SCANNING AND TRANSMISSION ELECTRON MICROSCOPY; SILICON COATINGS; SURFACE OXIDATIONS;

EID: 84879298134     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/24/27/275604     Document Type: Article
Times cited : (31)

References (29)
  • 2
    • 84863387283 scopus 로고    scopus 로고
    • 10.1088/0957-4484/23/12/125202 0957-4484 125202
    • Jin H and Liu G L 2012 Nanotechnology 23 125202
    • (2012) Nanotechnology , vol.23 , Issue.12
    • Jin, H.1    Liu, G.L.2
  • 5
    • 79551516858 scopus 로고    scopus 로고
    • 10.1016/j.ijleo.2010.03.011 0030-4026
    • Dubey R S and Gautam D K 2011 Optik 122 494
    • (2011) Optik , vol.122 , Issue.6 , pp. 494
    • Dubey, R.S.1    Gautam, D.K.2
  • 16
    • 0036468143 scopus 로고    scopus 로고
    • The future of crystalline silicon films on foreign substrates
    • DOI 10.1016/S0040-6090(01)01556-5, PII S0040609001015565
    • Bergmann R B and Werner J H 2002 Thin Solid Films 403 162 (Pubitemid 34102964)
    • (2002) Thin Solid Films , vol.403-404 , pp. 162-169
    • Bergmann, R.B.1    Werner, J.H.2
  • 21
    • 0035361075 scopus 로고    scopus 로고
    • Silicon microcavity light emitting devices
    • DOI 10.1016/S0925-3467(01)00016-7, PII S0925346701000167
    • Chan S and Fauchet P M 2001 Opt. Mater. 17 31 (Pubitemid 32637111)
    • (2001) Optical Materials , vol.17 , Issue.1-2 , pp. 31-34
    • Chan, S.1    Fauchet, P.M.2
  • 28
    • 0020707645 scopus 로고
    • Optical properties of thin amorphous silicon and amorphous hydrogenated silicon films produced by ion beam techniques
    • DOI 10.1016/0040-6090(83)90469-8
    • Martin P J, Netterfield R P, Sainty W G and McKenzie D R 1983 Thin Solid Films 100 141 (Pubitemid 13506384)
    • (1983) Thin Solid Films , vol.100 , Issue.2 , pp. 141-147
    • Martin, P.J.1    Netterfield, R.P.2    Sainty, W.G.3    McKenzie, D.R.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.