Magnetron sputtered a-SiOxNy thin films: A closed porous nanostructure with controlled optical and mechanical properties

Microporous and Mesoporous Materials

Volumn 149, Issue 1, 2012, Pages 142-146

  Godinho, V ^a   Rojas, T C ^a   Fernandez, A ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

Author keywords

Closed porosity; Mechanical stability; Silicon oxynitride; Tailored refractive index

Indexed keywords

CLOSED POROSITY; GASPHASE; GOOD STABILITY; MECHANICAL INTEGRITY; MOLECULAR NITROGEN; NANOPOROSITY; OPEN POROSITY; SILICON OXYNITRIDE; SILICON OXYNITRIDES; TAILORED REFRACTIVE INDEX;

AMORPHOUS SILICON; COATINGS; DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; NANOINDENTATION; POROSITY; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; SILICON OXIDES; TRANSMISSION ELECTRON MICROSCOPY;

MECHANICAL PROPERTIES;

EID: 80053936404     PISSN: 13871811     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micromeso.2011.08.018     Document Type: Article

References (24)

1. D. Criado, M.I. Alayo, M.C.A. Fantini, and I. Pereyra Journal of Non-Crystalline Solids 352 2006 2319 2323
2. M.L. Green, E.P. Gusev, R. Degraeve, and E.L. Garfunkel Journal of Applied Physics 90 2001 2057 2121
3. L. Martinu, and D. Poitras Journal of Vacuum Science & Technology, A: Vacuum, Surfaces, and Films 18 2000 2619 2645
4. M. Vetter Thin Solid Films 337 1999 118 122
5. M. Vogt, and R. Hauptmann Surface Coatings and Technology 74-75 1995 676 681
6. P. Hoffmann, D. Schmeißer, R.B. Beck, M. Cuch, M. Giedz, and A. Jakubowski Journal of Alloys and Compounds 382 2004 228 233
7. D.M. Brown, P.V. Gray, F.K. Heumann, H.R. Philipp, and E.A. Taft Journal of the Electrochemical Society 115 1968 311
8. B.K. Yen, R.L. White, R.J. Waltman, Q. Dai, D.C. Miller, A.J. Kellock, B. Marchon, P.H. Kasai, M.F. Toney, B.R. York, H. Deng, Q.-F. Xiao, and V. Raman Journal of Vacuum Science & Technology, A: Vacuum, Surfaces, and Films 21 2003 1895 1904
9. M.I. Alayo, D. Criado, L.C.D. Gonalves, and I. Pereyra Journal of Non-Crystalline Solids 338-340 2004 76 80
10. T.S. Eriksson, and C.G. Granqvist Journal of Applied Physics 60 1986 2081 2091
11. M. Ribeyro, I. Pereyra, and M.I. Alayo Thin Solid Films 426 2003 200 204
12. M. Serényi, M. Rácz, and T. Lohner Vacuum 61 2001 245 249
13. E.C. Samano, J. Camacho, and R. Machorro Journal of Vacuum Science & Technology, A: Vacuum, Surfaces, and Films 23 2005 1228 1233
14. M.R.B.K. Maex, D. Sharmiryan, F. Iacopi, S.H. Brongersma, and Z.S. Yanovitskaya Journal of Applied Physics 93 2003 8793 8841
15. V. Godinho, M.C.J. de Haro, J. Garcia-Lopez, V. Goossens, H. Terryn, M.P. Delplancke-Ogletree, and A. Fernandez Applied Surface Science 256 2010 4548 4553
16. V. Godinho, A. Fernandez, Procedimiento de obtención de recubrimientos mediante pulverización catódica y recubrimiento obtenible mediante dicho procedimiento, Spain, P200930085, PCT/ES 2010/070245 (for more details please contact asuncion@icmse.csic.es).
17. D.M. Mittleman, J.F. Bertone, P. Jiang, K.S. Hwang, and V.L. Colvin Journal of Chemical Physics 111 1999 345 354
18. W.C. Oliver, and G.M. Pharr Journal of Materials Research 7 1992 1564 1583
19. D. Briggs, and M.P. Seah Practical Surface Analysis 1990
20. V. Godinho, V.N. Denisov, B.N. Mavrin, N.N. Novikova, E.A. Vinogradov, V.A. Yakovlev, C. Fernádez-Ramos, M.C.J.d. Haro, and A. Fernández Applied Surface Science 256 2009 156 164
21. C.C. Ahn, and O.L. Krivanek EELS Atlas 1983 Gatan Inc.
22. L. Torrison, J.K.J. Tolle, S.K. Dey, D. Gu, I.S.T. Tsong, and P.A. Crozier Materials Science & Engineering, B: Solid-State Materials for Advanced Technology 97 2003 54 58
23. X. Tan, J. Wojcik, and P. Masher Journal of Vacum Science and Technology A 22 4 2004 1115 1119
24. X. Li, X. Yin, L. Zhang, L. Cheng, and Y. Qi Materials Science & Engineering, A: Structural Materials: Properties, Microstructure and Processing 500 2009 63 69