Large-area 2D periodic crystalline silicon nanodome arrays on nanoimprinted glass exhibiting photonic band structure effects

Nanotechnology

Volumn 23, Issue 13, 2012, Pages

  Becker, C ^a   Lockau, D ^a   Sontheimer, T ^a   Schubert Bischoff, P ^a   Rudigier Voigt, E ^b   Bockmeyer, M ^b   Schmidt, F ^c   Rech, B ^a  

^a HAHN MEITNER INSTITUT   (Germany)

^b SCHOTT AG   (Germany)

^c ZUSE INSTITUTE BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE SILICONS; DOWN-SCALING; ELECTRON BEAM EVAPORATION; FABRICATION METHOD; FINITE ELEMENT SIMULATIONS; HIGH RATE; NANODOMES; NEAR INFRARED; OPTIMIZED GEOMETRIES; PHOTONIC BAND STRUCTURES; REFLECTION MEASUREMENTS; SELECTIVE ETCHING; SOLID PHASE CRYSTALLIZATION; SQUARE LATTICES; VISIBLE WAVELENGTHS; WET-CHEMICAL ETCHING;

GEOMETRY; GLASS; OPTICAL PROPERTIES; WET ETCHING;

BAND STRUCTURE;

EID: 84858393827     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/13/135302     Document Type: Article

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