Structural and electrical properties of SnO2 films grown on r-cut sapphire at different substrate temperature by MOCVD

Vacuum

Volumn 99, Issue , 2014, Pages 110-114

  Luan, Caina ^a   Zhu, Zhen ^a   Mi, Wei ^a   Ma, Jin ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

Electrical properties; Scanning electron microscopy; SnO2 films; X ray diffraction

Indexed keywords

DIFFERENT SUBSTRATES; LOWER TEMPERATURES; ORIENTED GROWTH; POLYCRYSTALLINE; SAPPHIRE SUBSTRATES; STRUCTURAL AND ELECTRICAL PROPERTIES; SUBSTRATE TEMPERATURE; TWIN STRUCTURE;

FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TIN OXIDES; X RAY DIFFRACTION;

ELECTRIC PROPERTIES;

EID: 84879111812     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2013.05.011     Document Type: Article

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