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Volumn 508, Issue 2, 2010, Pages 370-374
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Influence of substrate temperature on mechanical, optical and electrical properties of ZnO:Al films
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Author keywords
High transparency; Mechanical properties; Nanostructures; Sputtering; Thin films
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Indexed keywords
AL-DOPED ZINC OXIDE;
ALUMINUM-DOPED ZINC OXIDE;
ELECTRICAL AND MECHANICAL PROPERTIES;
HIGH TRANSPARENCY;
INDENTATION TEST;
LOW RESISTIVITY;
NANO-SCRATCH;
OPTICAL AND ELECTRICAL PROPERTIES;
QUARTZ GLASS;
RADIO FREQUENCY MAGNETRON SPUTTERING;
RESISTANCE MEASUREMENT;
ROOM TEMPERATURE;
SUBSTRATE TEMPERATURE;
UV SPECTROPHOTOMETRY;
ZNO;
ZNO:AL FILMS;
ALUMINUM;
ELECTRIC PROPERTIES;
FILM PREPARATION;
MAGNETRON SPUTTERING;
METALLIC FILMS;
NANOSTRUCTURES;
OXIDE FILMS;
QUARTZ;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON WAFERS;
THIN FILMS;
TRANSPARENCY;
X RAY DIFFRACTION;
ZINC;
ZINC OXIDE;
MECHANICAL PROPERTIES;
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EID: 77957881911
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jallcom.2010.08.034 Document Type: Article |
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Times cited : (72)
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References (20)
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