Bi-material terahertz sensors using metamaterial structures

Optics Express

Volumn 21, Issue 11, 2013, Pages 13256-13271

  Alves, Fabio ^a   Grbovic, Dragoslav ^a   Kearney, Brian ^a   Lavrik, Nickolay V ^b   Karunasiri, Gamani ^a  

^a NAVAL POSTGRADUATE SCHOOL   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; METAMATERIALS; QUANTUM CASCADE LASERS;

BIMETALLIC EFFECTS; FABRICATION AND CHARACTERIZATIONS; FINITE ELEMENT SIMULATIONS; METAMATERIAL ABSORBERS; METAMATERIAL STRUCTURES; QUANTUM CASCADES; RESPONSIVITY; TERAHERTZ SENSORS;

SENSORS;

EID: 84878846240     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.013256     Document Type: Article

References (44)

1. J. F. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, "THz imaging and sensing for security applications- explosives, weapons, and drugs," Semicond. Sci. Technol. 20(7), S266-S280 (2005).
2. S. M. Kim, F. Hatami, J. S. Harris, A. W. Kurian, J. Ford, D. King, G. Scalari, M. Giovannini, N. Hoyler, J. Faist, and G. Harris, "Biomedical terahertz imaging with a quantum cascade laser," Appl. Phys. Lett. 88(15), 153903 (2006).
3. Z. D. Taylor, R. S. Singh, M. O. Culjat, J. Y. Suen, W. S. Grundfest, H. Lee, and E. R. Brown, "Reflective terahertz imaging of porcine skin burns," Opt. Lett. 33(11), 1258-1260 (2008).
4. J. E. Bjarnason, T. L. J. Chan, A. W. M. Lee, M. A. Celis, and E. R. Brown, "Millimeter-wave, terahertz, and midinfrared transmission through common clothing," Appl. Phys. Lett. 85(4), 519-521 (2004).
5. R. H. Clothier and N. Bourne, "Effects of THz exposure on human primary keratinocyte differentiation and viability," J. Biol. Phys. 29(2/3), 179-185 (2003).
6. A. W. M. Lee, B. S. Wil, S. Kumar, Qing Hu, and J. L. Reno, "Real-time imaging Using a 4.3-THz quantum cascade laser and a 320x240 microbolometer focal-plane array," IEEE Photon. Technol. Lett. 18(13), 1415-1417 (2006).
7. B. N. Behnken, G. Karunasiri, D. R. Chamberlin, P. R. Robrish, and J. Faist, "Real-time imaging using a 2.8 THz quantum cascade laser and uncooled infrared microbolometer camera," Opt. Lett. 33(5), 440-442 (2008).
8. D. Grbovic, N. V. Lavrik, S. Rajic, and P. G. Datskos, "Arrays of SiO2 substrate-free micromechanical uncooled infrared and terahertz detectors," J. Appl. Phys. 104(5), 054508 (2008).
9. B. Su and G. Duan, "A High sensitivity THz detector," Proc. SPIE 8195, 81951K (2011).
10. X. Liu, B. Wang, X. Lu, E. Liang, and G. Yang, "Far infrared/terahertz micromechanical imaging-array sensors based on nano-scale optical measurement technology," Proc. SPIE 7204, 720403 (2011).
11. G. P. Berman, B. M. Chenrobrod, A. R. Bilhop, and V. Gorshkov, "Uncooled infrared and terahertz detectors based on micromechanical mirror as a radiation pressure sensor," Proc. SPIE 8195, 819518 (2011).
12. J. Hastanin, Y. Renotte, K. Fleury-Frenette, J. M. Defise, and S. Habraken, "A far infrared/terahertz micromechanical sensor based on surface plasmons resonance," Proc. SPIE 7113, 71131C, 71131C-9 (2008).
13. S. Timoshenko, "Analysis of bi-metal thermostat," J. Opt. Soc. Am. 11(3), 233-255 (1925).
14. J. A. Harkey and T. W. Kenny, "1/f noise considerations for the design and process optimization of piezoresistive cantilevers," J. Microelectromech. Syst. 9(2), 226-235 (2000).
15. S. R. Hunter, R. A. Amantea, L. A. Goodman, D. B. Kharas, S. Gershtein, J. R. Matey, S. N. Perna, Y. Yu, N. Maley, and L. K. White, "High- sensitivity uncooled microcantilever infrared imaging arrays," Proc. SPIE 5074, 469-480 (2003).
16. J. Wu, G. K. Fedder, and L. R. Carley, "A low-noise low-offset capacitive sensing amplifier for a 50-μg/√Hz monolithic CMOS MEMS accelerometer," IEEE J. Sol. Stat. Circ. 39(5), 722-730 (2004).
17. Q. Zhang, Z. Miao, Z. Guo, F. Dong, Z. Xiong, X. Wu, D. Chen, C. Li, and B. Jiao, "Optical readout uncooled infrared imaging detector using knife-edge filter operation," Optoelec. Lett. 3(2), 119-122 (2007).
18. T. Cheng, Q. Zhang, B. Jiao, D. Chen, and X. Wu, "Optical readout sensitivity of deformed microreflector for uncooled infrared detector: Theoretical model and experimental validation," J. Opt. Soc. Am. A 26(11), 2353- 2361 (2009).
19. T. Perazzo, M. Mao, O. Kwon, A. Majumdar, J. B. Varesi, and P. Norton, "Infrared vision uncooled microoptomechanical camera," Appl. Phys. Lett. 74(23), 3567-3569 (1999).
20. S. Hunter, G. Maurer, G. Simelgor, S. Radhakrishnan, and J. Gray, "High sensitivity 25μm and 50μm pitch microcantilever IR imaging arrays," Proc. SPIE 6542, 65421F, 65421F-13 (2007).
21. Y. Zhao, M. Y. Mao, and R. Horowitz, "Optomechanical uncooled infrared imaging system: Design, microfabrication, and performance," J. Microelectromech. Syst. 11(2), 136-146 (2002).
22. F. Dong, Q. Zhang, D. Chen, L. Pan, Z. Guo, W. Wang, Z. Duan, and X. Wu, "An uncooled optically readable infrared imaging detector," Sens. Actuators A Phys. 133(1), 236-242 (2007).
23. H. T. Chen, J. F. O'Hara, A. K. Azad, and A. J. Taylor, "Manipulation of terahertz radiation using metamaterials," Laser Phot. Rev. 5(4), 513-533 (2011).
24. Y. Ma, Q. Chen, J. Grant, S. C. Saha, A. Khalid, and D. R. S. Cumming, "A terahertz polarization insensitive dual band metamaterial absorber," Opt. Lett. 36(6), 945-947 (2011).
25. H. Luo, Y. Z. Cheng, and R. Z. Gong, "Numerical study of metamaterial absorber and extending absorbance bandwidth based on multi-square patches," Eur. Phys. J. B 81(4), 387-392 (2011).
26. H. Tao, E. A. Kadlec, A. C. Strikwerda, K. Fan, W. J. Padilla, R. D. Averitt, E. A. Shaner, and X. Zhang, "Microwave and Terahertz wave sensing with metamaterials," Opt. Express 19(22), 21620-21626 (2011).
27. F. Alves, B. Kearney, D. Grbovic, N. V. Lavrik, and G. Karunasiri, "Strong terahertz absorption using SiO2/Al based metamaterial structures," Appl. Phys. Lett. 100(11), 111104 (2012).
28. F. Alves, D. Grbovic, B. Kearney, and G. Karunasiri, " Microelectromechanical systems bi-material Terahertz Sensor with Integrated Metamaterial Absorber," Opt. Lett. 37(11), 1886-1888 (2012).
29. Z. Djuric, D. Randjelovic, I. Jokic, J. Matovic, and J. Lamovecet, "A new approach to IR bimaterial detectors theory," Infrared Phys. Technol. 50(1), 51-57 (2007).
30. P. W. Kruse, "Uncooled Infrared Imaging Arrays and Systems," in Semiconductors and Semimetals 47: Uncooled Infrared Imaging Arrays and Systems, P. W. Kruse and D.D. Skatrud, ed. (Academic Press, 1997).
31. P. G. Datskos, N. V. Lavrik, and S. Rajic, "Performance of uncooled microcantilever thermal detectors," Rev. Sci. Instrum. 75(4), 1134-1148 (2004).
32. E. L. Dereniak and G. D. Boreman, Infrared Detectors and Systems (Wiley, 1996).
33. P. W. Kruse, Uncooled Thermal Imaging, Arrays Systems and Applications (SPIE Press, 2002).
34. Z. Y. Hu, T. Thundat, and R. J. Warmack, "Investigation of adsorption and absorption-induced stresses using microcantilever sensors," J. Appl. Phys. 90(1), 427-431 (2001).
35. D. Briggs, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37831 (personal communication, 2012).
36. B. Kearney, F. Alves, D. Grbovic, and G. Karunasiri, "Al/SiOx/Al single and multiband metamaterial absorbers for terahertz sensor applications," Opt. Eng. 52(1), 013801 (2013).
37. H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, "A metamaterial absorber for the terahertz regime: Design, fabrication and characterization," Opt. Express 16(10), 7181-7188 (2008).
38. H.-T. Chen, "Interference theory of metamaterial perfect absorbers," Opt. Express 20(7), 7165-7172 (2012).
39. Q. Y. Wen, Y. S. Xie, H. W. Zhang, Q. H. Yang, Y. X. Li, and Y. L. Liu, "Transmission line model and fields analysis of metamaterial absorber in the terahertz band," Opt. Express 17(22), 20256-20265 (2009).
40. D. Y. Shchegolkov, A. K. Azad, J. F. O'Hara, and E. I. Simakov, "Perfect subwavelength fishnet like metamaterial-based film terahertz absorbers," Phys. Rev. B 82(20), 205117 (2010).
41. H.-T. Chen, J. Zhou, J. F. O'Hara, F. Chen, A. K. Azad, and A. J. Taylor, "Antireflection coating using metamaterials and identification of its mechanism," Phys. Rev. Lett. 105(7), 073901 (2010).
42. T. Maier and H. Brückl, "Wavelength-tunable microbolometers with metamaterial absorbers," Opt. Lett. 34(19), 3012-3014 (2009).
43. J. Hao, L. Zhou, and M. Qiu, "Nearly total absorption of light and heat generation by plasmonic metamaterials," Phys. Rev. B 83(16), 165107 (2011).
44. S. Fathololoumi, D. Ban, H. Luo, E. Dupont, S. R. Laframboise, A. Boucherif, and H. C. Liu, "Thermal behavior investigation of terahertz quantum-cascade lasers," IEEE J. Quantum Electron. 44(12), 1139-1144 (2008).