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Volumn 37, Issue 11, 2012, Pages 1886-1888
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Microelectromechanical systems bimaterial terahertz sensor with integrated metamaterial absorber
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Author keywords
[No Author keywords available]
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Indexed keywords
BI-MATERIAL;
HIGH SENSITIVITY;
METAMATERIAL STRUCTURES;
OPTICAL READOUT;
QUANTUM CASCADES;
RESPONSIVITY;
SENSOR RESPONSE;
STRUCTURAL SUPPORT;
TERAHERTZ SENSORS;
THERMOMECHANICAL PROPERTIES;
THZ IMAGING;
THZ RADIATION;
TIME CONSTANTS;
ELECTROMECHANICAL DEVICES;
METAMATERIALS;
MICROMECHANICS;
NATURAL FREQUENCIES;
OPTICAL PROPERTIES;
QUANTUM CASCADE LASERS;
SENSORS;
MEMS;
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EID: 84863710976
PISSN: 01469592
EISSN: 15394794
Source Type: Journal
DOI: 10.1364/OL.37.001886 Document Type: Article |
Times cited : (87)
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References (16)
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