Layer-by-layer thinning of MoS2 by plasma

ACS Nano

Volumn 7, Issue 5, 2013, Pages 4202-4209

  Liu, Yulu ^a   Nan, Haiyan ^a   Wu, Xing ^b   Pan, Wei ^c   Wang, Wenhui ^a   Bai, Jing ^a   Zhao, Weiwei ^a   Sun, Litao ^b   Wang, Xinran ^c   Ni, Zhenhua ^a  

^a SOUTHEAST UNIVERSITY   (China)

^b Southeast University   (China)

^c NANJING UNIVERSITY   (China)

Author keywords

contrast; MoS2; photoluminescence; plasma induced thinning; Raman

Indexed keywords

CONTRAST; MOS2; NANO-METER SCALE; PHOTOLUMINESCENCE SPECTRUM; PLASMA-INDUCED; RAMAN; SEMICONDUCTOR PROCESS; TWO-DIMENSIONAL MATERIALS;

ATOMIC FORCE MICROSCOPY; ELECTRONIC STRUCTURE; MONOLAYERS; PHOTOLUMINESCENCE; PLASMAS; TRANSMISSION ELECTRON MICROSCOPY; TWO DIMENSIONAL;

MOLYBDENUM COMPOUNDS;

ARGON; DISULFIDE; MOLYBDENUM; MOLYBDENUM DISULFIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMICAL STRUCTURE; CHEMISTRY; CONFORMATION; METHODOLOGY; NANOTECHNOLOGY; PLASMA GAS; SPECTROSCOPY;

ARGON; DISULFIDES; MICROSCOPY, ATOMIC FORCE; MODELS, MOLECULAR; MOLECULAR CONFORMATION; MOLYBDENUM; NANOTECHNOLOGY; PLASMA GASES; SPECTRUM ANALYSIS;

EID: 84878304951     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn400644t     Document Type: Article

References (44)

1. Novoselov, K. S.; Geim, A. K.; Morozov, S. V.; Jiang, D.; Zhang, Y.; Dubonos, S. V.; Grigorieva, I. V.; Firsov, A. A. Electric Field Effect in Atomically Thin Carbon Films Science 2004, 306, 666
2. Novoselov, K. S.; Jiang, D.; Schedin, F.; Booth, T. J.; Khotkevich, V. V.; Morozov, S. V.; Geim, A. K. Two-Dimensional Atomic Crystals Proc. Natl. Acad. Sci. U.S.A. 2005, 102, 10451
3. Pacilé, D.; Meyer, J. C.; Girit, Ç. Ö.; Zettl, A. The Two-Dimensional Phase of Boron Nitride: Few-Atomic-Layer Sheets and Suspended Membranes Appl. Phys. Lett. 2008, 92, 133107
4. Wang, Q. H.; Kalantar-Zadeh, K.; Kis, A.; Coleman, J. N.; Strano, M. S. Electronics and Optoelectronics of Two-Dimensional Transition Metal Dichalcogenides Nat. Nanotechnol. 2012, 7, 699
5. Roxlo, C. B.; Chianeili, R. R.; Deckman, H. W.; Ruppert, A. F.; Wong, P. P. Bulk and Surface Optical Absorption in Molybdenum Disulfide J. Vac. Sci. Technol. 1987, 5, 555
6. 2 Transistors Nat. Nanotechnol. 2011, 6, 147
7. 2 Crystals Nat. Commun. 2012, 3, 1011
8. 2 MOSFETs ACS Nano 2012, 6, 8563
9. 2: A New Direct-Gap Semiconductor Phys. Rev. Lett. 2010, 105, 136805
10. 2 Nano Lett. 2010, 10, 1271
11. 2 by Optical Helicity Nat. Nanotechnol. 2012, 7, 494
12. 2 Monolayers by Optical Pumping Nat. Nanotechnol. 2012, 7, 490
13. Cao, T.; Wang, G.; Han, W. P.; Ye, H. Q.; Zhu, C. R.; Shi, J. R.; Niu, Q.; Tan, P. H.; Wang, E.; Liu, B. L. et al. Valley-Selective Circular Dichroism of Monolayer Molybdenum Disulphide Nat. Commun. 2012, 3, 887
14. 2 Nanosheets Adv. Mater. 2012, 24, 772
15. 2 ACS Nano 2011, 5, 9703
16. Feng, J.; Qian, X. F; Huang, C. W.; Li, J. Strain-Engineered Artificial Atom as a Broad-Spectrum Solar Energy Funnel Nat. Photonics 2012, 6, 866
17. 2 Atomic Layers with Chemical Vapor Deposition Adv. Mater. 2012, 24, 2320
18. 2 Substrate Small 2012, 8, 966
19. 2 Thin Layers on Insulating Substrates Nano Lett. 2012, 12, 1538
20. 2 Nano Lett. 2011, 11, 5111
21. Smith, R. J.; King, P. J.; Lotya, M.; Wirtz, C.; Khan, U.; De, S.; O'Neill, A.; Duesberg, G. S.; Grunlan, J. C.; Moriarty, G. et al. Large-Scale Exfoliation of Inorganic Layered Compounds in Aqueous Surfactant Solutions Adv. Mater. 2011, 23, 3944
22. Castro Neto, A. H.; Guinea, F.; Peres, N. M. R.; Novoselov, K. S.; Geim, A. K. The Electronic Properties of Graphene Rev. Mod. Phys. 2009, 81, 109
23. 2 Phototransistors ACS Nano 2012, 6, 74
24. 2 Nanosheet Phototransistors with Thickness-Modulated Optical Energy Gap Nano Lett. 2012, 12, 3695
25. 2 Nanocontacts Stimulated by Scanning Tunneling Microscopy Phys. Rev. B 2002, 66, 045401
26. Zhang, Y. B.; Tang, T. T.; Girit, C.; Hao, Z.; Martin, M. C.; Zettl, A.; Crommie, M. F.; Shen, Y. R.; Wang, F. Direct Observation of a Widely Tunable Bandgap in Bilayer Graphene Nature 2009, 459, 820
27. Thiti, T.; Kenji, W.; Takashi, T. C.; Pablo, J. H. Quantum Hall Effect and Landau-Level Crossing of Dirac Fermions in Trilayer Graphene Nat. Phys. 2011, 7, 621
28. 2 Transistors Nano Lett. 2012, 12, 4674
29. 2 Phototransistors with Spectral Response from Ultraviolet to Infrared Adv. Mater. 2012, 24, 5832
30. 2: On Demand Generation of a Single-Layer Semiconductor Nano Lett. 2012, 12, 3187
31. Wang, Y. Y.; Gao, R. X.; Ni, Z. H.; He, H.; Guo, S. P.; Yang, H. P.; Cong, C. X.; Yu, T. Thickness Identification of Two-Dimensional Materials by Optical Image Nanotechnology 2012, 23, 495713
32. 2 Sheets Small 2012, 8, 682
33. Ferrari, A. C.; Meyer, J. C.; Scardaci, V.; Casiraghi, C.; Lazzeri, M.; Mauri, F.; Piscanec, S.; Jiang, D.; Novoselov, K. S.; Roth, S. et al. Raman Spectrum of Graphene and Graphene Layers Phys. Rev. Lett. 2006, 97, 187401
34. 2: Evolution of Raman Scattering Adv. Funct. Mater. 2012, 22, 1385
35. 2 ACS Nano 2010, 4, 2695
36. Li, S. L.; Miyazaki, H.; Song, H. S.; Kuramochi, H.; Nakaharai, S.; Tsukagoshi, K. Quantitative Raman Spectrum and Reliable Thickness Identification for Atomic Layers on Insulating Substrates ACS Nano 2012, 6, 7381
37. 2 Phys. Rev. B 2011, 84, 155413
38. 2 Studied by Neutron Scattering Phys. Rev. B 1975, 12, 659
39. 2 Membranes Nano Lett. 2011, 11, 5148
40. Hazra, K. S.; Rafiee, J.; Rafiee, M. A.; Mathur, A.; Roy, S. S.; McLauhglin, J.; Koratkar, N.; Misra, D. S. Thinning of Multilayer Graphene to Monolayer Graphene in a Plasma Enviroment Nanotechnology 2011, 22, 025704
41. Yang, X. C.; Tang, S. J.; Ding, G. Q.; Xie, X. M.; Jiang, M. H.; Huang, F. Q. Layer-by-Layer Thinning of Graphene by Plasma Irradiation and Post-annealing Nanotechnology 2012, 23, 025704
42. 2 Plasma Etching of Graphite Appl. Phys. Lett. 2011, 98, 183114
43. 2 ACS Nano 2012, 6, 7311
44. Pan, W.; Xiao, J. L.; Zhu, J. W.; Yu, C. X.; Zhang, G.; Ni, Z. H.; Watanabe, K.; Taniguchi, T.; Shi, Y.; Wang, X. R. Biaxial Compressive Strain Engineering in Graphene/Boron Nitride Heterostructures Sci. Rep. 2012, 2, 893