Comparative study of mechanical and structural properties of CrN films deposited by d.c. magnetron sputtering and vacuum arc evaporation

Surface and Coatings Technology

Volumn 86-87, Issue PART 1, 1996, Pages 254-262

  Gautier, C ^a   Moussaoui, H ^a   Elstner, F ^a   Machet, J ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

Chromium nitride; Magnetron sputtering; Vacuum arc evaporation

Indexed keywords

CRYSTAL STRUCTURE; EVAPORATION; FILM GROWTH; HARDNESS; MAGNETRON SPUTTERING; RESIDUAL STRESSES; THERMAL EFFECTS; VACUUM APPLICATIONS; WEAR RESISTANCE;

CHROMIUM NITRIDE COATINGS; GROWTH MECHANISM; MACROSCOPIC FILM STRESS; MICROHARDNESS; SUBSTRATE BIAS VOLTAGE; SUBSTRATE TEMPERATURE; VACUUM ARC EVAPORATION;

PROTECTIVE COATINGS;

EID: 0030383010     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02951-9     Document Type: Article

References (20)

1. W. Münz and J. Göbel, Surf. Eng., 3 (1) (1987) 47.
2. S. Koniya, S. Ono, N. Umezo, T. Narusawa, Thin Solid Films, 45 (1977) 433.
3. K. Sugiyama, K. Hayashi, J. Sasakim, O. Ichiko and Y. Hashigushi, Nucl. Instrum. Methods Phys. Res., B 80/81 (1993) 1376.
4. A. Schröer, W. Ensinger and G. Wolf, Mater Sci. Eng., A 140 (1991) 625.
5. K. Shih, D. Dove and J. Crowe, J. Vac. Sci. Technol., A 4 (3) (1986) 564.
6. F. Attar and T. Johannesson, Thin Solid Films, 258 (1995) 205.
7. D. Wang and T. Oki, Thin Solid Films, 258 (1990) 219.
8. A. Ehrlich, M. Kühn, F. Richter and W. Hoyer, Surf. Coat. Technol., 76/77 (1995) 280.
9. H. Ljungcrantz, L. Hultman, I.E. Sundgren and L. Karlsson, J. Appl. Phys. 78 (2) (1995) 832.
10. P.C. Johnson, in J.L. Vossen and W. Kern (eds.), Thin Films Processes II, Ch. 115, p. 209.
11. F. Elstner, C. Gautier, O. Piot, G. Contoux, F. Cosset, F. Nardou and J. Machet, Phys. Stat. Sol., in press.
12. J.A. Sue, A.J. Perry and J. Vetter, Surf. Coat. Technol., 68/69 (1994) 126.
13. G. Knuyt, C. Quaeyhaegens, J. D'Haen and L.M. Stals, Thin Solid Films, 258 (1995) 159.
14. J. Pelleg, L.Z. Zevin and S. Lungo, Thin Solid Films, 197 (1991) 117.
15. A. Van Der Drift, Philips Res. Rep., 22 (1967) 267.
16. M. Ohring, The Material Science of Thin Films, Academic Press, Inc., San Diego, 1992, p. 429.
17. H. Holleck, J. Vac. Sci. Technol., A 4 (1986) 2661.
18. J.A. Sue, Surf. Coat. Technol., 61 (1993) 115.
19. L.E. Toth, Transition Metal Carbides and Nitrides, Academic Press, New York, 1971.
20. J. Vyslocik and J. Musil, J. Vac. Sci. Technol., A 10 (1992) 1740.