Residual stress, hardness and chemical stability of TiN coatings

Journal of Advanced Materials

Volumn 33, Issue 1, 2001, Pages 63-68

  King, H W ^a   Caughlin, T A ^b   Nagy, D R ^c  

^a UNIVERSITY OF VICTORIA   (Canada)

^b Goodyear Canada Inc   (Canada)

^c Liburdi Engineering Limited   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; FILM GROWTH; HARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; RESIDUAL STRESSES; STAINLESS STEEL; STEEL SHEET; TEMPERATURE; TENSILE STRESS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

DEPOSITION TEMPERATURE; DIFFERENTIAL THERMAL CONTRACTION; MICROSTRESSES; STAINLESS STEEL SHEET; TITANIUM NITRIDE COATINGS;

TITANIUM NITRIDE;

EID: 0035128152     PISSN: 10709789     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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