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Volumn 201, Issue 7 SPEC. ISS., 2006, Pages 4361-4366

Microstructure and mechanical properties of AlCrN films deposited by CFUBMS

Author keywords

Al Cr N; CFUBMS; Hardness; Thermal stability; Wear property

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; COMPOSITION; CRYSTAL MICROSTRUCTURE; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; THERMODYNAMIC STABILITY; WEAR OF MATERIALS; X RAY DIFFRACTION ANALYSIS;

EID: 33751306743     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.08.076     Document Type: Article
Times cited : (50)

References (15)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.