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Volumn 201, Issue 7 SPEC. ISS., 2006, Pages 4361-4366
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Microstructure and mechanical properties of AlCrN films deposited by CFUBMS
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Author keywords
Al Cr N; CFUBMS; Hardness; Thermal stability; Wear property
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Indexed keywords
ANNEALING;
AUGER ELECTRON SPECTROSCOPY;
COMPOSITION;
CRYSTAL MICROSTRUCTURE;
HARDNESS;
INDENTATION;
MAGNETRON SPUTTERING;
MORPHOLOGY;
SCANNING ELECTRON MICROSCOPY;
THERMODYNAMIC STABILITY;
WEAR OF MATERIALS;
X RAY DIFFRACTION ANALYSIS;
CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING (CFUBMS);
HARDNESS MEASUREMENTS;
WEAR PROPERTY;
WEAR TESTS;
ALUMINUM COMPOUNDS;
ALUMINUM COMPOUNDS;
ANNEALING;
AUGER ELECTRON SPECTROSCOPY;
COMPOSITION;
CRYSTAL MICROSTRUCTURE;
HARDNESS;
INDENTATION;
MAGNETRON SPUTTERING;
MORPHOLOGY;
SCANNING ELECTRON MICROSCOPY;
THERMODYNAMIC STABILITY;
WEAR OF MATERIALS;
X RAY DIFFRACTION ANALYSIS;
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EID: 33751306743
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2006.08.076 Document Type: Article |
Times cited : (50)
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References (15)
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