Influence of oxygen flow rate on the structural and mechanical properties of reactively magnetron sputter-deposited Zr-B-O coatings

Thin Solid Films

Volumn 347, Issue 1-2, 1999, Pages 78-84

  Pierson, J F ^a   Billard, A ^a   Belmonte, T ^a   Michel, H ^a   Frantz, C ^a  

^a Lab Sci Genie Surf (UMR C   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; COATINGS; COMPOSITION EFFECTS; FLOW OF FLUIDS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; OXYGEN; SPUTTER DEPOSITION; STRUCTURE (COMPOSITION); ZIRCONIUM COMPOUNDS;

REACTIVE SPUTTERING; STRUCTURAL PROPERTIES; ZIRCONIUM DIBORIDE;

THIN FILMS;

EID: 0345201744     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01732-5     Document Type: Article

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