Structural, optical and light scattering properties of post etched RF sputtered ZnO:Al thin films deposited at various substrate temperature

Optical Materials

Volumn 35, Issue 7, 2013, Pages 1352-1359

  Bhavanasi, Venkateswarlu ^a   Singh, Chandra Bhal ^a,b   Datta, Debjit ^a   Singh, Vandana ^a   Shahi, Keshawa ^a   Kumar, Satyendra ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

^b SSN Institutions   (India)

Author keywords

Dislocation density; Light scattering properties; RF magnetron sputtering; Urbach energy; Wet chemical etching; ZnO thin films

Indexed keywords

ALUMINA; ALUMINUM OXIDE; CHLORINE COMPOUNDS; ENERGY GAP; II-VI SEMICONDUCTORS; LIGHT SCATTERING; MAGNETRON SPUTTERING; METALLIC FILMS; REFRACTIVE INDEX; SOLAR CELLS; SURFACE SCATTERING; THIN FILMS; WET ETCHING; ZINC OXIDE;

DISLOCATION DENSITIES; RF-MAGNETRON SPUTTERING; SCATTERING PROPERTY; URBACH ENERGY; ZNO THIN FILM;

OPTICAL FILMS;

EID: 84876670528     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optmat.2013.01.037     Document Type: Article

References (51)

1. A. Masuda, K. Imamori, and H. Matsumura Thin Solid Films 411 2002 166 170
2. J.H. Thomas, and A. Catalano Appl. Phys. Lett. 43 1983 101 102
3. S. Major, S. Kumar, M. Bhatnagar, and K.L. Chopra Appl. Phys. Lett. 49 1986 394 396
4. N. Chantarat, S.-H. Hsu, C.-C. Lin, M.-C. Chiang, and S.-Y. Chen J. Mater. Chem. 22 2012 8005 8012
5. M.N. Kamalasanan, and S. Chandra Thin Solid Films 288 1996 112 115
6. B. Pal, and M. Sharon Mater. Chem. Phys. 76 2002 82 87
7. T. Maruyama, and J. Shionoya J. Mater. Sci. Lett. 11 1992 170 172
8. A. Yamada, B. Sang, and M. Konagai Appl. Surf. Sci. 112 1997 216 222
9. K. Matsubara, P. Fons, K. Iwata, A. Yamada, K. Sakurai, H. Tampo, and S. Niki Thin Solid Films 431 2003 369 372
10. M. Krunks, and E. Mellikov Thin Solid Films 270 1995 33 36
11. A. El-Shaer, A.C. Mofor, A. Bakin, M. Kreye, and A. Waag Superlattices Microstruct. 38 2005 265 271
12. C.R. Gorla, N.W. Emanetoglu, S. Liang, W.E. Mayo, Y. Lu, M. Wraback, and H. Shen J. Appl. Phys. 85 1999 2595 2598
13. G. Kiriakidis, M. Suchea, S. Christolakis, P. Horvath, T. Kitsopoulos, and J. Stoemenos Thin Solid Films 515 2007 8577 8581
14. K.H. Yoon, J. Choi, and D. Lee Thin Solid Films 302 1997 116 121
15. K.-K. Kim, J.-H. Song, J.-H. Jung, W.-K. Choi, S.-J. Park, and J.-H. Song J. Appl. Phys. 87 2000 3573-3
16. J.-S. Cho, S. Baek, and K.H. Yoon Curr. Appl. Phys. 11 2011 S2 S7
17. Z. Yu, A. Raman, and S. Fan PNAS 107 2010 17491 17496
18. J. Krc, M. Zeman, F. Smole, J.W. Metselaar, and M. Topic Solar Energy Mater. Solar Cells 74 2002 401 406
19. J. Krc, A. Campa, S. Luxemberg, M.Zeman, M.Topic, in: MRS Spring Meeting, Symposium KK, March 2008, San Francisko, USA.
20. H. Zhu, J. Hupkes, E. Bunte, J. Owen, and S.M. Haung Solar Energy Mater. Solar cells 95 2011 964 968
21. W.T. Xen, Y.C. Lin, and J.H. Ke Appl. Surf. Sci. 257 2010 960 968
22. O. Kluth, B. Rech, L. Houben, S. Wieder, G. Schope, C. Beneking, H. Wagner, A. Loffl, and H.W. Schock Thin Solid Films 351 1999 247 253
23. O. Kluth, G. Schope, J. Hupkes, C. Agashe, J. Muller, and B. Rech Thin Solid Films 442 2003 80 85
24. J. Yoo, J. Lee, S. Kim, K. Yoon, I.J. Park, S.K. Dhungel, B. Karunagaran, D. Mangalaraj, and J. Yi Thin Solid Films 480 481 2005 213 217
25. M. Berginski, J. Hüpkes, W. Reetz, B. Rech, and M. Wuttig Thin Solid Films 516 2008 5836 5841
26. E. Krikorian, and R.J. Sneed J. Appl. Phys. 37 1966 3665 3669
27. F. Couzinié-Devy, N. Barreau, and J. Kessler Thin Solid Films 516 2008 7094 7097
28. S.B. Krupanidhi, and M. Sayer J. Appl. Phys. 56 1984 3308 3311
29. Y.E. Lee, J.B. Lee, Y.J. Kim, H.K. Yang, J.C. Park, and H.J. Kim J. Vac. Sci. Technol. A 14 1996 1943 1948
30. K. Tominaga, N. Ueshiba, Y. Shintani, and O. Tada Jpn. J. Appl. Phys. 20 1981 519 526
31. K. Tominaga, Y. Sueyoshi, C. Munfei, and Y. Shintani Jpn. J. Appl. Phys. 32 1993 4131 4135
32. J.A. Thornton Thin Solid Films 107 1983 3 19
33. T. Minami, H. Sato, S. Takata, N. Ogawa, and T. Mouri Jpn. J. Appl. Phys. 31 1992 L1106 1109
34. B.D. Cullity, and S.R. Stock Elements of X-ray Diffraction 2001 Prentice-Hall Inc. Third ed.
35. J. Tauc, R. Grigorovici, and A. Vancu Phys. State Solid 15 1966 627 637
36. R. Ondo-Ndong, F. Pascal-Delannoy, A. Boyer, A. Giani, and A. Foucaran Mater. Sci. Eng. B 97 2003 68 73
37. K.H. Kim, K.C. Park, and D.Y. Ma J. Appl. Phys. 81 1997 7764 7772
38. R. Menon, V. Gupta, H.H. Tan, K. Sreenivas, and C. Jagdish J. Appl. Phys. 109 2011 064905 64906
39. H.P. He, F. Zhuge, Z.Z. Ye, L.P. Zhu, F.Z. Wang, B.H. Zhao, and J.Y. Huang J. Appl. Phys. 99 2006 023503 23505
40. H.C. Ong, A.X.E. Zhu, and G.T. Du Appl. Phys. Lett. 80 2002 941 943
41. A.K. Kulkarni, K.H. Schulz, T.S. Lim, and M. Khan Thin Solid Films 345 1999 273 277
42. E. Burstein Phys. Rev. 93 1954 632 633
43. S. Uthanna, T.K. Subramanyam, B. Srinivasulu Naidu, and G. Mohan Rao Opt. Mater. 19 2002 461 469
44. O. Caporatelli Solar Energy Mater. 7 1982 65 73
45. M. Gabas, S. Gota, J.R. Ramos-Barrado, M. Sanchez, N.T. Barrett, J. Avila, and M. Sacchi Appl. Phys. Lett. 86 2005 042104-3
46. P. Tyagi, and A.G. Vedeshwar Bull. Mater. Sci. 24 2001 297 300
47. A. Fouchet, W. Prellier, B. Mercey, L. Mechin, V.N. Kulkarni, and T. Venkatesan J. Appl. Phys. 96 2004 3228-6
48. F. Urbach Phys. Rev. 92 1953 1324-1324
49. D. Dimova-Malinovska, H. Nichev, O. Angelov, V. Grigorov, and M. Kamenova Superlattices Microstruct. 42 2007 123 128
50. R. Swanepoel J. Phys. E: Sci. Instrum. 17 1984 896 903
51. T.S. Moss Phys. State Solid B 131 1985 415 427