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Volumn 3, Issue , 2013, Pages

Anion control as a strategy to achieve high-mobility and high-stability oxide thin-film transistors

Author keywords

[No Author keywords available]

Indexed keywords

ANION; NITROGEN; OXIDE; OXYGEN; ZINC OXIDE;

EID: 84876534167     PISSN: None     EISSN: 20452322     Source Type: Journal    
DOI: 10.1038/srep01459     Document Type: Article
Times cited : (159)

References (33)
  • 2
    • 78149382528 scopus 로고    scopus 로고
    • Present status of amorphous In-Ga-Zn-O thin-film transistors
    • Kamiya, T., Nomura, K. & Hosono, H. Present status of amorphous In-Ga-Zn-O thin-film transistors. Sci. Technol. Adv. Mater. 11, 044305 (2010).
    • (2010) Sci. Technol. Adv. Mater , vol.11 , pp. 044305
    • Kamiya, T.1    Nomura, K.2    Hosono, H.3
  • 3
    • 9744248669 scopus 로고    scopus 로고
    • Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
    • DOI 10.1038/nature03090
    • Nomura, K. et al. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors. Nature 432, 488-492 (2004). (Pubitemid 39585210)
    • (2004) Nature , vol.432 , Issue.7016 , pp. 488-492
    • Nomura, K.1    Ohta, H.2    Takagi, A.3    Kamiya, T.4    Hirano, M.5    Hosono, H.6
  • 4
    • 0038362743 scopus 로고    scopus 로고
    • Thin-film transistor fabricated in single-crystalline transparent oxide semiconductor
    • DOI 10.1126/science.1083212
    • Nomura, K. et al. Thin-film transistor fabricated in single-crystalline transparent oxide semiconductor. Science 300, 1269-1272 (2003). (Pubitemid 36621429)
    • (2003) Science , vol.300 , Issue.5623 , pp. 1269-1272
    • Nomura, K.1    Ohta, H.2    Ueda, K.3    Kamiya, T.4    Hirano, M.5    Hosono, H.6
  • 5
    • 84855965812 scopus 로고    scopus 로고
    • Review of recent developments in amorphous oxide semiconductor thin-film transistor devices
    • Park, J. S., Maeng, W-J., Kim, H-S. & Park, J-S. Review of recent developments in amorphous oxide semiconductor thin-film transistor devices. Thin Solid Films 520, 1679-1693 (2012).
    • (2012) Thin Solid Films , vol.520 , pp. 1679-1693
    • Park, J.S.1    Maeng, W.-J.2    Kim, H.-S.3    Park, J.-S.4
  • 6
    • 33749233582 scopus 로고    scopus 로고
    • Anion vacancies as a source of persistent photoconductivity in II-VI and chalcopyrite semiconductors
    • Lany, S. & Zunger, A. Anion vacancies as a source of persistent photoconductivity in II-VI and chalcopyrite semiconductors. Phys. Rev. B 72, 035215 (2005).
    • (2005) Phys. Rev. B , vol.72 , pp. 035215
    • Lany, S.1    Zunger, A.2
  • 7
    • 79955151187 scopus 로고    scopus 로고
    • Investigation of light-induced bias instability in Hf-In-Zn-Othin film transistors: A Cation combinatorial approach
    • Kwon, J-Y. et al. Investigation of light-induced bias instability in Hf-In-Zn-Othin film transistors: A Cation combinatorial approach. J. Electrochem. Soc. 158, H433-H437 (2011).
    • (2011) J. Electrochem. Soc , vol.158
    • Kwon, J.-Y.1
  • 8
    • 80052029477 scopus 로고    scopus 로고
    • The influence of In/Zn ratio on the performance and negative-bias instability of Hf-In-Zn-O thin-film transistors under illumination
    • Kim, H-S. et al. The influence of In/Zn ratio on the performance and negative-bias instability of Hf-In-Zn-O thin-film transistors under illumination. IEEE Electron Device Lett. 32, 1251-1253 (2011).
    • (2011) IEEE Electron Device Lett , vol.32 , pp. 1251-1253
    • Kim, H.-S.1
  • 9
    • 77958044304 scopus 로고    scopus 로고
    • Persistent photoconductivity in Hf-In-Zn-O thin film transistors
    • Ghaffarzadeh, K. et al. Persistent photoconductivity in Hf-In-Zn-O thin film transistors. Appl. Phys. Lett. 97, 143510 (2010).
    • (2010) Appl. Phys. Lett , vol.97 , pp. 143510
    • Ghaffarzadeh, K.1
  • 10
    • 77956853370 scopus 로고    scopus 로고
    • Instability in threshold voltage and subthreshold behavior in Hf-In-Zn-O thin film transistors induced by bias-and light-stress
    • Ghaffarzadeh, K. et al. Instability in threshold voltage and subthreshold behavior in Hf-In-Zn-O thin film transistors induced by bias-and light-stress. Appl. Phys. Lett. 97, 113504 (2010).
    • (2010) Appl. Phys. Lett , vol.97 , pp. 113504
    • Ghaffarzadeh, K.1
  • 11
    • 78149458396 scopus 로고    scopus 로고
    • Light induced instabilities in amorphous indium-gallium-zinc-oxide thin-film transistors
    • Chowdhury, M. D. H., Migliorato, P. & Jang, J. Light induced instabilities in amorphous indium-gallium-zinc-oxide thin-film transistors. Appl. Phys. Lett. 97, 173506 (2010).
    • (2010) Appl. Phys. Lett , vol.97 , pp. 173506
    • Chowdhury, M.D.H.1    Migliorato, P.2    Jang, J.3
  • 12
    • 84862818967 scopus 로고    scopus 로고
    • Gated three-terminal device architecture to eliminate persistent photoconductivity in oxide semiconductor photosensor arrays
    • Jeon, S. et al. Gated three-terminal device architecture to eliminate persistent photoconductivity in oxide semiconductor photosensor arrays. Nature Mater. 11, 301-305 (2012).
    • (2012) Nature Mater , vol.11 , pp. 301-305
    • Jeon, S.1
  • 13
    • 84861029475 scopus 로고    scopus 로고
    • Metal Oxide Thin Film Phototransistor for Remote Touch Interactive Displays
    • Ahn, S-E. et al. Metal Oxide Thin Film Phototransistor for Remote Touch Interactive Displays. Adv. Mater. 24, 2631-2636 (2012).
    • (2012) Adv. Mater , vol.24 , pp. 2631-2636
    • Ahn, S.-E.1
  • 14
    • 0034720154 scopus 로고    scopus 로고
    • Inorganic yellow-red pigments without toxic metals
    • DOI 10.1038/35010082
    • Jansen, M. & Letschert, H. P. Inorganic yellow-red pigments without toxic metals. Nature 404, 980-982 (2000). (Pubitemid 30243588)
    • (2000) Nature , vol.404 , Issue.6781 , pp. 980-982
    • Jansen, M.1    Letschert, H.P.2
  • 15
    • 0035854541 scopus 로고    scopus 로고
    • Visible-light photocatalysis in nitrogen-doped titanium oxides
    • DOI 10.1126/science.1061051
    • Asahi, R., Morikawa, T., Ohwaki, T., Aoki, K. & Taga, Y. Visible-Light Photocatalysis in Nitrogen-Doped Titanium Oxides. Science 293, 269-271 (2001). (Pubitemid 32694736)
    • (2001) Science , vol.293 , Issue.5528 , pp. 269-271
    • Asahi, R.1    Morikawa, T.2    Ohwaki, T.3    Aoki, K.4    Taga, Y.5
  • 16
    • 0037183946 scopus 로고    scopus 로고
    • Efficient Photochemical Water Splitting by a chemically Modified n-TiO2
    • Khan, S. U. M., Al-Shahry, M. & Ingler Jr, W. B. Efficient Photochemical Water Splitting by a chemically Modified n-TiO2. Science 297, 2243-2245 (2002).
    • (2002) Science , vol.297 , pp. 2243-2245
    • Khan, S.U.M.1    Al-Shahry, M.2    Ingler Jr., W.B.3
  • 17
    • 79956013025 scopus 로고    scopus 로고
    • Band gap narrowing of titanium dioxide by sulfur doping
    • Umebayashi, T., Yamaki, T., Itoh, H. & Asai, K. Band gap narrowing of titanium dioxide by sulfur doping. Appl. Phys. Lett. 81, 454-456 (2002).
    • (2002) Appl. Phys. Lett , vol.81 , pp. 454-456
    • Umebayashi, T.1    Yamaki, T.2    Itoh, H.3    Asai, K.4
  • 18
    • 0242355022 scopus 로고    scopus 로고
    • Daylight Photocatalysis by Carbon-Modified Titanium Dioxide
    • DOI 10.1002/anie.200351577
    • Sakthivel, S. & Kisch, H. Daylight Photocatalysis by Carbon-Modified Titanium Dioxide. Angew. Chem. Int. Ed. 42, 4908-4911 (2003). (Pubitemid 37345387)
    • (2003) Angewandte Chemie - International Edition , vol.42 , Issue.40 , pp. 4908-4911
    • Sakthivel, S.1    Kisch, H.2
  • 19
    • 72049132652 scopus 로고    scopus 로고
    • Intrinsic n-Type Behavior in Transparent Conducting Oxides: A Comparative Hybrid-Functional Study of In2O3, SnO2, and ZnO
    • Agoston, P., Albe, K., Nieminen, R. & Puska, M. J. Intrinsic n-Type Behavior in Transparent Conducting Oxides: A Comparative Hybrid-Functional Study of In2O3, SnO2, and ZnO. Phys. Rev. Lett. 103, 245501 (2009).
    • (2009) Phys. Rev. Lett , vol.103 , pp. 245501
    • Agoston, P.1    Albe, K.2    Nieminen, R.3    Puska, M.J.4
  • 20
    • 70350089441 scopus 로고    scopus 로고
    • High mobility amorphous zinc oxynitride semiconductor material for thin film transistors
    • Ye, Y., Lim, R. & White, J. M. High mobility amorphous zinc oxynitride semiconductor material for thin film transistors. J. Appl. Phys. 106, 074512 (2009).
    • (2009) J. Appl. Phys , vol.106 , pp. 074512
    • Ye, Y.1    Lim, R.2    White, J.M.3
  • 21
    • 0032496544 scopus 로고    scopus 로고
    • Structural, electrical and optical properties of zinc nitride thin films prepared by reactive rf magnetron sputtering
    • Futsuhara, M., Yoshioka, K. & Takai, O. Structural, electrical and optical properties of zinc nitride thin films prepared by reactive rf magnetron sputtering. Thin Solid Films 322, 274-281 (1998). (Pubitemid 128422684)
    • (1998) Thin Solid Films , vol.322 , Issue.1-2 , pp. 274-281
    • Futsuhara, M.1    Yoshioka, K.2    Takai, O.3
  • 22
    • 33645951645 scopus 로고    scopus 로고
    • Band-gap energy and electron effective mass of polycrystalline Zn3N2
    • Suda, T. & Kakishita, K. Band-gap energy and electron effective mass of polycrystalline Zn3N2. J. Appl. Phys. 99, 076101 (2006).
    • (2006) J. Appl. Phys , vol.99 , pp. 076101
    • Suda, T.1    Kakishita, K.2
  • 23
    • 78149421289 scopus 로고    scopus 로고
    • Structural and electrical characteristics of high quality (100) oriented-Zn3N2 thin films grown by radio-frequency magnetron sputtering
    • Xing, G. Z. et al. Structural and electrical characteristics of high quality (100) oriented-Zn3N2 thin films grown by radio-frequency magnetron sputtering. J. Appl. Phys. 108, 083710 (2010).
    • (2010) J. Appl. Phys. , vol.108 , pp. 083710
    • Xing, G.Z.1
  • 24
    • 84861057865 scopus 로고    scopus 로고
    • Microscopic origin of universal quasilinear band structures of transparent conducting oxides
    • Kang, Y. et al. Microscopic origin of universal quasilinear band structures of transparent conducting oxides. Phys. Rev. Lett. 108, 196404 (2012).
    • (2012) Phys. Rev. Lett , vol.108 , pp. 196404
    • Kang, Y.1
  • 26
    • 37349077681 scopus 로고    scopus 로고
    • 2
    • DOI 10.1016/j.tsf.2007.06.107, PII S0040609007010590
    • Long, R., Dai, Y., Yu, L., Huang, B. & Han, S. Atomic geometry and electronic structure of defects in Zn3N2. Thin Solid Films 516, 1297-1301 (2008). (Pubitemid 350298367)
    • (2008) Thin Solid Films , vol.516 , Issue.6 , pp. 1297-1301
    • Long, R.1    Dai, Y.2    Yu, L.3    Huang, B.4    Han, S.5
  • 27
    • 36849027568 scopus 로고    scopus 로고
    • Enhanced photoelectrochemical responses of ZnO films through Ga and N codoping
    • Ahn, K-S. et al. Enhanced photoelectrochemical responses of ZnO films through Ga and N codoping. Appl. Phys. Lett. 91, 231909 (2007).
    • (2007) Appl. Phys. Lett , vol.91 , pp. 231909
    • Ahn, K.-S.1
  • 28
    • 12844286241 scopus 로고
    • Ab initio molecular dynamics for liquid metals
    • Kresse, G.&Hafner, J. Ab initio molecular dynamics for liquid metals. Phys. Rev. B 47, 558-561 (1993).
    • (1993) Phys. Rev. B , vol.47 , pp. 558-561
    • Kresse, G.1    Hafner, J.2
  • 29
    • 27744460065 scopus 로고
    • Ab initio molecular-dynamics simulation of the liquid-metalamorphous- semiconductor transition in germanium
    • Ab initio molecular-dynamics simulation of the liquid-metalamorphous- semiconductor transition in germanium. Phys. Rev. B, 49, 14251-14269 (1994).
    • (1994) Phys. Rev. B , vol.49 , pp. 14251-14269
  • 30
    • 25744460922 scopus 로고
    • Projector augmented-wave method
    • Blöchl, P. E. Projector augmented-wave method. Phys. Rev. B 50, 17953-17979 (1994).
    • (1994) Phys. Rev. B , vol.50 , pp. 17953-17979
    • Blöchl, P.E.1
  • 31
    • 0037799714 scopus 로고    scopus 로고
    • Hybrid functional based on a screened Coulomb potential
    • Heyd, J., Scuseria, G. E. & Ernzerhof, M. Hybrid functional based on a screened Coulomb potential. J. Chem. Phys. 118, 8207-8215 (2003).
    • (2003) J. Chem. Phys , vol.118 , pp. 8207-8215
    • Heyd, J.1    Scuseria, G.E.2    Ernzerhof, M.3
  • 32
    • 4243943295 scopus 로고    scopus 로고
    • Generalized gradient approximation made simple
    • Perdew, J. P., Burke, K. & Ernzerhof, M. Generalized gradient approximation made simple. Phys. Rev. Lett. 77, 3865-3868 (1996). (Pubitemid 126631804)
    • (1996) Physical Review Letters , vol.77 , Issue.18 , pp. 3865-3868
    • Perdew, J.P.1    Burke, K.2    Ernzerhof, M.3
  • 33
    • 80255135612 scopus 로고    scopus 로고
    • Hybrid functional study on structural and electronic properties of oxides
    • Park, S., Lee, B., Jeon, S. H. & Han, S. Hybrid functional study on structural and electronic properties of oxides. Curr. Appl. Phys. 11, S337-S340 (2011).
    • (2011) Curr. Appl. Phys , vol.11
    • Park, S.1    Lee, B.2    Jeon, S.H.3    Han, S.4


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