A monolithic poly(dimethylsiloxane) electrostatic actuator for controlling integrated pneumatic microsystems

Sensors and Actuators, A: Physical

Volumn 196, Issue , 2013, Pages 22-29

  Tice, Joshua D ^a   Bassett, Thomas A ^a   Desai, Amit V ^a   Apblett, Christopher A ^b,c   Kenis, Paul J A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c MSC01 1070   (United States)

Author keywords

Electrostatic actuator; Microfluidics; Microvalve; Pneumatic microsystems; Soft lithography

Indexed keywords

ANCILLARY EQUIPMENT; ELECTRICAL SIGNAL; MICRO FLUIDIC APPLICATIONS; MICRO FLUIDIC SYSTEM; MICRO VALVES; PORTABLE APPLICATIONS; SOFT-LITHOGRAPHIC TECHNIQUES; SOFT-LITHOGRAPHY;

ELECTROSTATIC ACTUATORS; LITHOGRAPHY; MICROFLUIDICS; MICROSYSTEMS; PNEUMATICS; TRANSDUCERS; VALVES (MECHANICAL);

PNEUMATIC ACTUATORS;

EID: 84876531845     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.03.020     Document Type: Article

References (41)

1. M.J. Anderson, C.L. Hansen, and S.R. Quake The use of microfluidic devices towards protein crystallography Biophysical Journal 88 2005 55A
2. S.L. Perry, G.W. Roberts, J.D. Tice, R.B. Gennis, and P.J.A. Kenis Microfluidic generation of lipidic mesophases for membrane protein crystallization Crystal Growth & Design 9 2009 2566 2569
3. M. Diehn, R.W. Cho, N.A. Lobo, T. Kalisky, M.J. Dorie, A.N. Kulp, D.L. Qian, J.S. Lam, L.E. Ailles, M.Z. Wong, B. Joshua, M.J. Kaplan, I. Wapnir, F.M. Dirbas, G. Somlo, C. Garberoglio, B. Paz, J. Shen, S.K. Lau, S.R. Quake, J.M. Brown, I.L. Weissman, and M.F. Clarke Association of reactive oxygen species levels and radioresistance in cancer stem cells Nature 458 2009 780-U123
4. P.M. Fordyce, D. Gerber, D. Tran, J. Zheng, H. Li, J.L. DeRisi, and S.R. Quake De novo identification and biophysical characterization of transcription-factor binding sites with microfluidic affinity analysis Nature Biotechnology 28 2010 970 975
5. M.A. Unger, H.P. Chou, T. Thorsen, A. Scherer, and S.R. Quake Monolithic microfabricated valves and pumps by multilayer soft lithography Science 288 2000 113 116 (Pubitemid 30203039)
6. K.A. Addae-Mensah, Y.K. Cheung, V. Fekete, M.S. Rendely, and S.K. Sia Actuation of elastomeric microvalves in point-of-care settings using handheld, battery-powered instrumentation Lab on a Chip 10 2010 1618 1622
7. W. Gu, H. Chen, Y.-C. Tung, J.-C. Meiners, and S. Takayama Multiplexed hydraulic valve actuation using ionic liquid filled soft channels and braille displays Applied Physics Letters 90 2007 033505 33513
8. T. Thorsen, S.J. Maerkl, and S.R. Quake Microfluidic large-scale integration Science 298 2002 580 584 (Pubitemid 35215308)
9. I.E. Araci, and S.R. Quake Microfluidic very large scale integration (MVLSI) with integrated micromechanical valves Lab on a Chip 12 2012 2803 2806
10. A. Douglas, A.L. Gregory, and K.G. Bruce An electrostatic microvalve for pneumatic control of microfluidic systems Journal of Micromechanics and Microengineering 22 2012 025019
11. A.V. Desai, J.D. Tice, C.A. Apblett, and P.J.A. Kenis Design considerations for electrostatic microvalves with applications in poly(dimethylsiloxane)-based microfluidics Lab on a Chip 12 2012 1078 1088
12. K.J. Hsia, Y. Huang, E. Menard, J.U. Park, W. Zhou, J. Rogers, and J.M. Fulton Collapse of stamps for soft lithography due to interfacial adhesion Applied Physics Letters 86 2005 154106 154113
13. K.G. Sharp, G.S. Blackman, N.J. Glassmaker, A. Jagota, and C.-Y. Hui Effect of stamp deformation on the quality of microcontact printing: theory and experiment Langmuir 20 2004 6430 6438
14. Z. Wu, Z. Chen, X. Du, J.M. Logan, J. Sippel, M. Nikolou, K. Kamaras, J.R. Reynolds, D.B. Tanner, A.F. Hebard, and A.G. Rinzler Transparent, conductive carbon nanotube films Science 305 2004 1273 1276 (Pubitemid 39129228)
15. Y. Zhou, L. Hu, and G. Gruner A method of printing carbon nanotube thin films Applied Physics Letters 88 2006 123109 123113
16. A. Thangawng, R. Ruoff, M. Swartz, and M. Glucksberg An ultra-thin pdms membrane as a bio/micro-nano interface: fabrication and characterization Biomedical Microdevices 9 2007 587 595
17. V. Studer, G. Hang, A. Pandolfi, M. Ortiz, W.F. Anderson, and S.R. Quake Scaling properties of a low-actuation pressure microfluidic valve Journal of Applied Physics 95 2004 393 398
18. T. Bansal, M.-P. Chang, and M.M. Maharbiz A class of low voltage, elastomer-metal 'wet' actuators for use in high-density microfluidics Lab on a Chip 7 2007 164 166 (Pubitemid 46238538)
19. M.-P. Chang, and M.M. Maharbiz Electrostatically-driven elastomer components for user-reconfigurable high density microfluidics Lab on a Chip 9 2009 1274 1281
20. B.S. Driggs, M.M. Enzelberger, S.R. Quake, Electrostatic valves for microfluidic devices, US Patent 7232109 (2002).
21. M.A. Unger, Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes, US Patent 7075162 (2007).
22. E. YIldIrIm, M.A.S. ArIkan, and H. Külah A normally-closed electrostatic parylene microvalve for micro total analysis systems Sensors and Actuators A: Physical 181 2012 81 86
23. E. YIldIrIm, and H. Külah Analysis and characterization of an electrostatically actuated in-plane parylene microvalve Journal of Micromechanics and Microengineering 21 2011 105009
24. D. Juncker, M., Nannini, V. Logiudice, Electrical microvalve and method of manufacturing thereof, Int. Pat. 12513381 (2007).
25. N. Bowden, S. Brittain, A.G. Evans, J.W. Hutchinson, and G.M. Whitesides Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer Nature 393 1998 146 149 (Pubitemid 28242249)
26. N. Pekas, Q. Zhang, M. Nannini, and D. Juncker Wet-etching of structures with straight facets and adjustable taper into glass substrates Lab on a Chip 10 2010 494 498
27. C. Liu Recent developments in polymer mems Advanced Materials 19 2007 3783 3790 (Pubitemid 350190413)
28. L. Hu, D.S. Hecht, and G. Grüner Percolation in transparent and conducting carbon nanotube networks Nano Letters 4 2004 2513 2517 (Pubitemid 40002395)
29. M. Kaempgen, G.S. Duesberg, and S. Roth Transparent carbon nanotube coatings Applied Surface Science 252 2005 425 429 (Pubitemid 41276936)
30. R. Andrews, and M.C. Weisenberger Carbon nanotube polymer composites Current Opinion in Solid State and Materials Science 8 2004 31 37 (Pubitemid 38814676)
31. J.N. Coleman, U. Khan, W.J. Blau, and Y.K. Gun'ko Small but strong: a review of the mechanical properties of carbon nanotube-polymer composites Carbon 44 2006 1624 1652
32. J. Engel, J. Chen, C. Nannan, S. Pandya, and L. Chang Multi-walled carbon nanotube filled conductive elastomers: materials and application to micro transducers Proceedings of the 19th IEEE International Conference on Micro Electro Mechanical Systems, 22-26 January Istanbul 2006 246 249 (Pubitemid 44592276)
33. M.P. de Boer, and T.A. Michalske Accurate method for adhesion of cantilever beams Journal of Applied Physics 86 1999 817 827 (Pubitemid 129308264)
34. E.E. Parker, W.R. Ashurst, C. Carraro, and R. Maboudian Adhesion characteristics of mems in microfluidic environments Journal of Microelectromechanical Systems 14 2005 947 953 (Pubitemid 41555286)
35. Z. Yapu Stiction and anti-stiction in mems and nems Acta Mechanica Sinica 19 2003 1 10
36. C. Cabuz, E.I. Cabuz, T.R. Ohnstein, J. Neus, and R. Maboudian Factors enhancing the reliability of touch-mode electrostatic actuators Sensors and Actuators A: Physical 79 2000 245 250 (Pubitemid 30556646)
37. B. Byunghoon, H. Jeahyeong, R.I. Masel, and M.A. Shannon A bidirectional electrostatic microvalve with microsecond switching performance Journal of Microelectromechanical Systems 16 2007 1461 1471 (Pubitemid 350239139)
38. M.J. Owen, and P.J. Smith Plasma treatment of polydimethylsiloxane Journal of Adhesion Science and Technology 8 1994 1063 1075
39. S. Timoshenko, and S. Woinowsky-Krieger Theory of Plates and Shells 2nd edition 1959 McGraw-Hill Book Company New York
40. C.H. Mastrangelo, and C.H. Hsu Mechanical stability and adhesion of microstructures under capillary forces - part ii: Experiments Journal of Microelectromechanical Systems 2 1993 44 55
41. K. Yoshida, S. Tanaka, Y. Hagihara, S. Tomonari, and M. Esashi Normally closed electrostatic microvalve with pressure balance mechanism for portable fuel cell application Sensors and Actuators A: Physical 157 2010 290 298