An electrostatic microvalve for pneumatic control of microfluidic systems

Journal of Micromechanics and Microengineering

Volumn 22, Issue 2, 2012, Pages

  Anjewierden, Douglas ^a   Liddiard, Gregory A ^a   Gale, Bruce K ^a  

^a University of Utah   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY DEPTH; CHROME LAYER; CONTROL FLOWS; CONTROL VALVES; CONTROL VOLTAGES; COPPER FOILS; DIELECTRIC CHARGING; FLEXIBLE MEMBRANES; MICRO FLUIDIC SYSTEM; MICRO VALVES; MICRO-FLUIDIC DEVICES; PARYLENE C; PARYLENES; UNIQUE FEATURES;

COPPER; ELECTROSTATICS; ESTERS; PNEUMATIC CONTROL; VALVES (MECHANICAL);

FLUIDIC DEVICES;

EID: 84857975465     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/2/025019     Document Type: Article

References (18)

1. Hui Liu R, Yang J, Lenigk F, Bonanno J and Grodzinski P 2004 Self-contained, fully integrated biochip for sample preparation, polymerase chain reaction amplification, and DNA microarray detection Anal. Chem. 76 182431 (Pubitemid 38451495)
2. Vyawahare S, Sitaula S, Martin S, Adalian D and Scherer A 2008 Electronic control of elastomeric circuits with shape memory actuators Lab. Chip 8 15305
3. Oh K W and Ahn C H 2006 A review of microvalves J. Micromech. Microeng. 16 R1339
4. Zhang C, Xing D and Li Y 2007 Micropumps, microvalves, and micromixers within PCR microfluidic chips: advances and trends Biotechnol. Adv. 25 483514 (Pubitemid 47049789)
5. Messner S, Schaible J, Vollmer J, Sandmaier H and Zengerle R 2003 Electrostatic driven 3-way silicon microvalve for pneumatic applications 16th Annu. Int. Conf. on Micro Electro Mechanical Systems IEEE (Kyoto) pp 8891
6. Xie J, Shih J, Lin Q, Yang B and Tai Y 2004 Surface micromachined electrostatically actuated micro peristaltic pump Lab. Chip 4 495501 (Pubitemid 39468923)
7. Madou M J 2002 Fundamentals of Microfabrication: the Science of Miniaturization 2nd edn (Boca Raton, FL: CRC Press) p 547
8. Sasaki H, Shikida M and Sato K 2006 A force transmission system based on a tulip-shaped electrostatic clutch for haptic display devices J. Micromech. Microeng. 16 267383 (Pubitemid 46069537)
9. Haji-Babaei J, Kwok C Y and Huang R S 1997 Integrable active microvalve with surface micromachined curled-up actuator Int. Conf. on Solid-State Sensors and Actuators Transducers (Chicago, 1997,) pp 8336
10. Sato K and Shikida M 1992 Electrostatic film actuator with a large vertical displacement MEMS92: IEEE Proc. Conf. on Micro Electro Mechanical Systems (Travemunde, Germany, Feb. 1992,) 15 (Pubitemid 23562116)
11. Saucedo-Flores E, Ruelas R, Flores M and Chiao J 2003 Study of the pull-in voltage for MEMS parallel plate capacitor actuators A5.86 Proc. Material Research Society Symposium (Warrendale) ed D LaVan 17
12. Goldsmith C, Ehmke J, Malczewski A, Pillans B, Eshelman S, Yao Z, Brank J and Eberly M 2001 Lifetime characterization of capacitive RF MEMS switches IEEE MTT-S Int. Microwave Symp. Digest (Phoenix, AZ, May 2001) pp 22730 (Pubitemid 34078718)
13. Yuan X, Cherepko S, Hwang J, Goldsmith C, Nordquist C and Dyck C 2004 Initial observation and analysis of dielectric-charging effects of RF MEMS capacitive switches IEEE MTT-S Int. Microwave Symp. Digest pp 19436
14. Yoa T-J, Walsh K and Tai Y-C 2002 Dielectric charging effects on parylene electrostatic actuators 15th Int. Conf. on Micro Electro Mechanical Systems IEEE (Las Vegas) pp 6147 (Pubitemid 34216348)
15. Peng Z, Yuan X, Hwang J, Forehand D and Goldsmith C 2007 Dielectric charging of RF MEMS capacitive switches under bipolar control-voltage waveforms Int. Microwave Symp. IEEE (Honolulu, 2007) pp 181720 (Pubitemid 47486356)
16. Cabuz C 1999 Dielectric related effects in micromachined electrostatic actuators 1999 Conf. on Electrical Insulation and Dielectric Phenomena IEEE (Austin,) pp 32732 (Pubitemid 30539682)
17. Goll C et al 1997 An electrostatically actuated polymer microvalve equipped with a movable membrane electrode J. Micromech. Microeng. 7 2246 (Pubitemid 127607085)
18. Schomberg W K et al 1998 AMANDAlow-cost production of microfluidic devices Sensors Actuators A 70 1538