Analysis and characterization of an electrostatically actuated in-plane parylene microvalve

Journal of Micromechanics and Microengineering

Volumn 21, Issue 10, 2011, Pages

  Yildirim, E ^a,b   Kulah H ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

^b CANKAYA UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYSIS AND CHARACTERIZATION; FLOW CHARACTERISTIC; FLOW TESTS; HIGH DIELECTRIC CONSTANTS; IN-PLANE; INLET PRESSURES; LAB-ON-A-CHIP DEVICES; LEAKAGE FLOW; MICRO VALVES; MICROMACHINING TECHNIQUES; PARYLENES; PRECISE CONTROL; PULL-IN; WORKING FLUID;

AIR; ELECTROSTATIC ACTUATORS; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; INLET FLOW; LEAKAGE (FLUID); MICROMACHINING; PUMPS; VALVES (MECHANICAL);

DIAPHRAGMS;

EID: 80053580220     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/10/105009     Document Type: Article

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