Organic vapor passivation of silicon at room temperature

Advanced Materials

Volumn 25, Issue 14, 2013, Pages 2078-2083

  Yang, Rong ^a   Buonassisi, Tonio ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

air stable; antireflective coatings; chemical vapor deposition; low surface recombination velocity; organic passivation of silicon surfaces

Indexed keywords

AIR-STABLE; ANTI REFLECTIVE COATINGS; INITIATED CHEMICAL VAPOR DEPOSITIONS; PASSIVATION LAYER; SCALABLE METHODS; SILICON SURFACES; SURFACE RECOMBINATION VELOCITIES; VAPOR-PHASE TREATMENT;

CHEMICAL VAPOR DEPOSITION; COATINGS; PASSIVATION; SCALABILITY; SILICON;

VAPORS;

EID: 84876049169     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.201204382     Document Type: Article

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