SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 5, 2009, Pages 1135-1143

Transition between kinetic and mass transfer regimes in the initiated chemical vapor deposition from ethylene glycol diacrylate

(2) Ozaydin Ince, Gozde a Gleason, Karen K a

a Massachusetts Institute of Technology Cambridge (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPARENT ACTIVATION ENERGY; CONFORMALITY; DEPOSITION KINETICS; DEPOSITION MECHANISM; DIACRYLATES; DIFFERENT SUBSTRATES; FILAMENT TEMPERATURE; GASPHASE; INVERSE RELATIONS; PROCESS PARAMETERS; PROCESS TEMPERATURE; RADICAL CONCENTRATION; RATE-LIMITING REACTION; SUBSTRATE TEMPERATURE; SYSTEMATIC STUDY; TERT-BUTYL PEROXIDE;

ACTIVATION ENERGY; ADSORPTION; CHEMICAL VAPOR DEPOSITION; DEPOSITION RATES; ETHYLENE; ETHYLENE GLYCOL; FILAMENTS (LAMP); FOURIER TRANSFORM INFRARED SPECTROSCOPY; MASS TRANSFER; REACTION RATES; SPECTROSCOPIC ANALYSIS; SPECTROSCOPY; VAPORS;

DEPOSITION;

EID: 70349137512 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3168553 Document Type: Article

Times cited : (81)

References (31)

1
- 84986976900
- 10.1002/pen.760140713
- L. F. Thompson, E. D. Feit, and R. D. Heidenreich, Polym. Eng. Sci. 14, 529 (1974). 10.1002/pen.760140713
- (1974) Polym. Eng. Sci. , vol.14 , pp. 529
- Thompson, L.F.¹ Feit, E.D.² Heidenreich, R.D.³

2
- 84892269391
- 4th ed. (Springer, Berlin Heidelberg)
- D. Braun, H. Cherdron, M. Rehahn, H. Ritter, and B. Voit, Polymer Synthesis: Theory and Practice: Fundamentals, Methods, Experiments, 4th ed. (Springer, Berlin Heidelberg, 2005), pp. 152-155.
- (2005) Polymer Synthesis: Theory and Practice: Fundamentals, Methods, Experiments , pp. 152-155
- Braun, D.¹ Cherdron, H.² Rehahn, M.³ Ritter, H.⁴ Voit, B.⁵

3
- 0004201645
- (Academic, Orlando, FL).
- H. Yasuda, Plasma Polymerization (Academic, Orlando, FL, 1985).
- (1985) Plasma Polymerization
- Yasuda, H.¹

4
- 0033787415
- 10.1021/cm000499w
- K. K. S. Lau, J. A. Caulfield, and K. K. Gleason, Chem. Mater. 12, 3032 (2000). 10.1021/cm000499w
- (2000) Chem. Mater. , vol.12 , pp. 3032
- Lau, K.K.S.¹ Caulfield, J.A.² Gleason, K.K.³

5
- 0035960778
- Perfluorooctane sulfonyl fluoride as an initiator in hot-filament chemical vapor deposition of fluorocarbon thin films
- DOI 10.1021/la0104929
- H. G. P. Lewis, J. A. Caulfield, and K. K. Gleason, Langmuir 17, 7652 (2001). 10.1021/la0104929 (Pubitemid 35331004)
- (2001) Langmuir , vol.17 , Issue.24 , pp. 7652-7655
- Pryce Lewis, H.G.¹ Caulfield, J.A.² Gleason, K.K.³

6
- 33745745929
- A mechanistic study of initiated chemical vapor deposition of polymers: Analyses of deposition rate and molecular weight
- DOI 10.1021/ma051776t
- K. Chan and K. K. Gleason, Macromolecules 39, 3890 (2006). 10.1021/ma051776t (Pubitemid 44013265)
- (2006) Macromolecules , vol.39 , Issue.11 , pp. 3890-3894
- Chan, K.¹ Gleason, K.K.²

7
- 33744462659
- Initiated Chemical Vapor Deposition (iCVD) of poly(alkyl acrylates): An experimental study
- DOI 10.1021/ma0601619
- K. K. S. Lau and K. K. Gleason, Macromolecules 39, 3688 (2006). 10.1021/ma0601619 (Pubitemid 43798249)
- (2006) Macromolecules , vol.39 , Issue.10 , pp. 3688-3694
- Lau, K.K.S.¹ Gleason, K.K.²

8
- 12444272525
- 10.1021/ja01269a023
- S. Brunauer, P. H. Emmett, and E. J. Teller, Jr., J. Am. Chem. Soc. 60, 309 (1938). 10.1021/ja01269a023
- (1938) J. Am. Chem. Soc. , vol.60 , pp. 309
- Brunauer, S.¹ Emmett, P.H.² Teller Jr., E.J.³

9
- 33744481819
- Initiated Chemical Vapor Deposition (iCVD) of poly(alkyl acrylates): A kinetic model
- DOI 10.1021/ma0601621
- K. K. S. Lau and K. K. Gleason, Macromolecules 39, 3695 (2006). 10.1021/ma0601621 (Pubitemid 43803711)
- (2006) Macromolecules , vol.39 , Issue.10 , pp. 3695-3703
- Lau, K.K.S.¹ Gleason, K.K.²

10
- 55349144858
- 10.1002/cvde.200806713
- S. H. Baxamusa and K. K. Gleason, Chem. Vap. Deposition 14, 313 (2008). 10.1002/cvde.200806713
- (2008) Chem. Vap. Deposition , vol.14 , pp. 313
- Baxamusa, S.H.¹ Gleason, K.K.²

11
- 0004002507
- (Wiley, New York).
- A. W. Adamson, Physical Chemistry of Surfaces (Wiley, New York, 1982).
- (1982) Physical Chemistry of Surfaces
- Adamson, A.W.¹

12
- 33748549915
- Initiated chemical vapor deposition of polyvinylpyrrolidone-based thin films
- DOI 10.1016/j.polymer.2006.07.068, PII S0032386106009098, Stucture and Dynamics of Complex Polymeric MAterials Commemorating Tadeusz Pakula
- K. Chan, L. E. Kostun, W. E. Tenhaeff, and K. K. Gleason, Polymer 47, 6941 (2006). 10.1016/j.polymer.2006.07.068 (Pubitemid 44374598)
- (2006) Polymer , vol.47 , Issue.20 , pp. 6941-6947
- Chan, K.¹ Kostun, L.E.² Tenhaeff, W.E.³ Gleason, K.K.⁴

13
- 33751341575
- 10.1002/cvde.200606495
- T. P. Martin and K. K. Gleason, Chem. Vap. Deposition 12, 685 (2006). 10.1002/cvde.200606495
- (2006) Chem. Vap. Deposition , vol.12 , pp. 685
- Martin, T.P.¹ Gleason, K.K.²

14
- 33846146699
- Initiated chemical vapor deposition of poly(1H,1H,2H,2H-perfluorodecyl acrylate) thin films
- DOI 10.1021/la061904m
- M. Gupta and K. K. Gleason, Langmuir 22, 10047 (2006). 10.1021/la061904m (Pubitemid 46079284)
- (2006) Langmuir , vol.22 , Issue.24 , pp. 10047-10052
- Gupta, M.¹ Gleason, K.K.²

15
- 33747188968
- Initiated chemical vapor deposition of trivinyltrimethylcyclotrisiloxane for biomaterial coatings
- DOI 10.1021/la0607858
- W. S. O'Shaughnessy, M. L. Gao, and K. K. Gleason, Langmuir 22, 7021 (2006). 10.1021/la0607858 (Pubitemid 44231447)
- (2006) Langmuir , vol.22 , Issue.16 , pp. 7021-7026
- O'Shaughnessy, W.S.¹ Gao, M.² Gleason, K.K.³

16
- 34250661099
- Initiated chemical vapor deposition of alternating copolymers of styrene and maleic anhydride
- DOI 10.1021/la070086a
- W. E. Tenhaeff and K. K. Gleason, Langmuir 23, 6624 (2007). 10.1021/la070086a (Pubitemid 46943486)
- (2007) Langmuir , vol.23 , Issue.12 , pp. 6624-6630
- Tenhaeff, W.E.¹ Gleason, K.K.²

17
- 25844517208
- Initiated chemical vapor deposition of linear and cross-linked poly(2-hydroxyethyl methacrylate) for use as thin-film hydrogels
- DOI 10.1021/la051004q
- K. Chan and K. K. Gleason, Langmuir 21, 8930 (2005). 10.1021/la051004q (Pubitemid 41396657)
- (2005) Langmuir , vol.21 , Issue.19 , pp. 8930-8939
- Chan, K.¹ Gleason, K.K.²

18
- 33644804848
- Air-gap fabrication using a sacrificial polymeric thin film synthesized via initiated chemical vapor deposition
- DOI 10.1149/1.2168297
- K. Chan and K. K. Gleason, J. Electrochem. Soc. 153, C223 (2006). 10.1149/1.2168297 (Pubitemid 43352241)
- (2006) Journal of the Electrochemical Society , vol.153 , Issue.4
- Chan, K.¹ Gleason, K.K.²

19
- 40549093381
- Cross-linked organic sacrificial material for air gap formation by initiated chemical vapor deposition
- DOI 10.1149/1.2837838
- L. H. Lee and K. K. Gleason, J. Electrochem. Soc. 155, G78 (2008). 10.1149/1.2837838 (Pubitemid 351357514)
- (2008) Journal of the Electrochemical Society , vol.155 , Issue.4
- Lee, L.H.¹ Gleason, K.K.²

20
- 0032630269
- 10.1021/ma981917+
- P. G. Mekarbane and B. J. Tabner, Macromolecules 32, 3620 (1999). 10.1021/ma981917+
- (1999) Macromolecules , vol.32 , pp. 3620
- Mekarbane, P.G.¹ Tabner, B.J.²

21
- 0000303117
- 10.1116/1.584165
- T. H. T. Wu, R. S. Rosler, B. C. Lamartine, R. B. Gregory, and H. G. J. Tompkins, J. Vac. Sci. Technol. B 6, 1707 (1988). 10.1116/1.584165
- (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 1707
- Wu, T.H.T.¹ Rosler, R.S.² Lamartine, B.C.³ Gregory, R.B.⁴ Tompkins, H.G.J.⁵

22
- 0033166104
- Chemical reaction engineering in the design of CVD reactors
- DOI 10.1016/S0009-2509(98)00443-6, PII S0009250998004436, ISCRE 15 part A
- H. Komiyama, Y. Shimogaki, and Y. Egashira, Chem. Eng. Sci. 54, 1941 (1999). 10.1016/S0009-2509(98)00443-6 (Pubitemid 29401061)
- (1999) Chemical Engineering Science , vol.54 , Issue.13-14 , pp. 1941-1957
- Komiyama, H.¹ Shimogaki, Y.² Egashira, Y.³

23
- 0142089927
- 10.1116/1.1600451
- J. E. Crowell, J. Vac. Sci. Technol. A 21, S88 (2003). 10.1116/1.1600451
- (2003) J. Vac. Sci. Technol. A , vol.21 , pp. 88
- Crowell, J.E.¹

24
- 0003774488
- 4th ed., edited by J. Brandrup, E. H. Immergut, and E. A. Grulke (Wiley-Interscience, New York), Sec.,.
- Polymer Handbook, 4th ed., edited by, J. Brandrup, E. H. Immergut, and, E. A. Grulke, (Wiley-Interscience, New York, 1999), Sec., p. 27.
- (1999) Polymer Handbook , pp. 27

25
- 0027814930
- 10.1016/0257-8972(93)90266-Q
- K. Tankala and T. Debroy, Surf. Coat. Technol. 62, 349 (1993). 10.1016/0257-8972(93)90266-Q
- (1993) Surf. Coat. Technol. , vol.62 , pp. 349
- Tankala, K.¹ Debroy, T.²

26
- 33745823098
- Some peculiarities of the asymmetric Graetz problem
- DOI 10.1016/j.ijengsci.2006.02.003, PII S0020722506000528
- J. Mitrovic, B. Maletic, and B. S. Baclic, Int. J. Eng. Sci. 44, 436 (2006). 10.1016/j.ijengsci.2006.02.003 (Pubitemid 44037605)
- (2006) International Journal of Engineering Science , vol.44 , Issue.7 , pp. 436-455
- Mitrovic, J.¹ Maletic, B.² Baclic, B.S.³

27
- 34147191972
- A computational model for the hot-filament chemical vapour deposition process to produce diamond films
- DOI 10.1088/0965-0393/15/3/004, PII S0965039307325862, 004
- M. Olivas-Martinez, M. Perez-Tello, R. Cabanillas-Lopez, O. Contreras-Lopez, G. Soto-Herrera, and F. Castillon-Barraza, Modell. Simul. Mater. Sci. Eng. 15, 237 (2007). 10.1088/0965-0393/15/3/004 (Pubitemid 46553662)
- (2007) Modelling and Simulation in Materials Science and Engineering , vol.15 , Issue.3 , pp. 237-261
- Olivas-Martinez, M.¹ Perez-Tello, M.² Cabanillas-Lopez, R.³ Contreras-Lopez, O.⁴ Soto-Herrera, G.⁵ Castillon-Barraza, F.⁶

28
- 1842529545
- 10.1021/la0359427
- Y. Mao and K. K. Gleason, Langmuir 20, 2484 (2004). 10.1021/la0359427
- (2004) Langmuir , vol.20 , pp. 2484
- Mao, Y.¹ Gleason, K.K.²

29
- 40849125445
- 10.1016/j.polymer.2008.02.027
- X. Chen and M. Anthamatten, Polymer 49, 1823 (2008). 10.1016/j.polymer. 2008.02.027
- (2008) Polymer , vol.49 , pp. 1823
- Chen, X.¹ Anthamatten, M.²

30
- 0004101892
- 2nd ed., (Butterworth, London),.
- D. O. Hayword and B. M. W. Trapnell, In Chemisorption, 2nd ed., (Butterworth, London, 1964), p. 198.
- (1964) In Chemisorption , pp. 198
- Hayword, D.O.¹ Trapnell, B.M.W.²

31
- 0004090605
- (Noyes, Ridge Park, NJ)
- J. E. J. Schmitz, Chemical Vapor Deposition of Tungsten and Tungsten Silicides (Noyes, Ridge Park, NJ, 1992), pp. 17-40.
- (1992) Chemical Vapor Deposition of Tungsten and Tungsten Silicides , pp. 17-40
- Schmitz, J.E.J.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.