Very low bulk and surface recombination in oxidized silicon wafers

Semiconductor Science and Technology

Volumn 17, Issue 1, 2002, Pages 35-38

  Kerr, Mark J ^a   Cuevas, Andres ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CRYSTALLINE MATERIALS; HIGH TEMPERATURE EFFECTS; OPTIMIZATION; SEMICONDUCTOR DOPING; SILICA; SURFACE PHENOMENA; THERMOOXIDATION;

SURFACE RECOMBINATIONS;

SILICON WAFERS;

EID: 0036141466     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/17/1/306     Document Type: Article

References (18)