Large-scale initiated chemical vapor deposition of poly(glycidyl methacrylate) thin films

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 1579-1584

  Gupta, Malancha ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

Chemical vapor deposition (CVD); Large area substrates; Polymers

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MOLECULAR WEIGHT; MONOMERS; ORGANIC POLYMERS; POLYMERIZATION;

INITIATED CHEMICAL VAPOR DEPOSITION (ICVD); LARGE AREA SUBSTRATES; SUBSTRATE TEMPERATURE; VINYL MONOMERS;

THIN FILMS;

EID: 33750801629     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.05.021     Document Type: Article

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