Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping

Applied Physics Letters

Volumn 102, Issue 7, 2013, Pages

  Najar, Hadi ^a   Heidari, Amir ^b   Chan, Mei Lin ^b   Yang, Hseuh An ^c   Lin, Liwei ^c   Cahill, David G ^d   Horsley, David A ^a,b  

^a University of California Davis   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d United States of America   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON-DOPED; DOUBLE-ENDED-TUNING-FORK RESONATORS; FREQUENCY RANGES; HEAT TRANSPORT; HOT-FILAMENT CHEMICAL VAPOR DEPOSITION; MECHANICAL QUALITY FACTORS; MICRO-MACHINED; MICROCRYSTALLINE DIAMOND; MICROCRYSTALLINE DIAMOND FILMS; QUALITY FACTORS; THERMOELASTIC DAMPING; THERMOELASTIC DISSIPATION; TIME DOMAIN THERMOREFLECTANCE;

CHEMICAL VAPOR DEPOSITION; MICROMECHANICAL RESONATORS; RESONATORS; THERMAL CONDUCTIVITY; THERMOELASTICITY;

DIAMOND FILMS;

EID: 84874509892     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4793234     Document Type: Article

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