Tensile and Compressive stress dependency of the transverse (e31,f) piezoelectric coefficient of PZT thin films for MEMS devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6526, Issue , 2007, Pages

  Prume, Klaus ^a   Muralt, Paul ^b   Schmitz Kempen, Thorsten ^a   Tiedke, Stephan ^a  

^a AIXACCT SYSTEMS GMBH   (Germany)

^b EPFL   (Switzerland)

Author keywords

Effective piezoelectric response (d33,f, and e31,f,); MEMS; PZT thin film

Indexed keywords

COMPRESSIVE STRESS; INTERFEROMETERS; LASER BEAMS; MEMS; PERMITTIVITY; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY;

ELECTROMECHANICAL RESPONSE; PIEZOELECTRIC COEFFICIENTS; SIGNAL POLARIZATION;

THIN FILMS;

EID: 35548994574     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.714960     Document Type: Conference Paper

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