Piezoelectric coefficient measurement of piezoelectric thin films: An overview

Materials Chemistry and Physics

Volumn 75, Issue 1-3, 2002, Pages 12-18

  Liu, J M ^a,b,c   Pan, B ^a   Chan, H L W ^a,b   Zhu, S N ^a   Zhu, Y Y ^a   Liu, Z G ^a  

^a NANJING UNIVERSITY   (China)

^b HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^c INTERNATIONAL CENTRE FOR MATERIALS PHYSICS   (China)

Author keywords

Piezoelectric coefficient; Piezoelectric thin films

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC SURFACE WAVE DEVICES; ELECTRODES; PIEZOELECTRIC TRANSDUCERS; RESONANCE; THIN FILMS;

PIEZOELECTRIC THIN FILMS;

PIEZOELECTRIC MATERIALS;

EID: 0037188114     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(02)00023-8     Document Type: Conference Paper

References (24)