Impact of crystallisation processes on depth profile formation in sol-gel PbZr0·52Ti0·48O3 thin films

Advances in Applied Ceramics

Volumn 112, Issue 1, 2013, Pages 53-58

  Aulika, I ^a   Mergen, S ^b   Bencan, A ^c   Zhang, Q ^d   Dejneka, A ^e   Kosec, M ^c   Kundzins, K ^f   Demarchi, D ^g   Civera, P ^h  

^a Eltek Group   (Italy)

^b UNIVERSITY OF MELBOURNE   (Australia)

^c JO EF STEFAN INSTITUTE   (Slovenia)

^d CRANFIELD UNIVERSITY   (United Kingdom)

^e INSTITUTE OF PHYSICS   (Czech Republic)

^f UNIVERSITY OF LATVIA   (Latvia)

^g ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

^h POLITECNICO DI TORINO   (Italy)

Author keywords

Compositional and optical gradient; Crystallisation process; Depth profile; PZT; Sol gel; Spectroscopic ellipsometry; Thin films; XRD

Indexed keywords

CHEMICAL SOLVENTS; COMPOSITIONAL AND OPTICAL GRADIENT; DEPTH PROFILE; FILM PERFORMANCE; OPTIMISATIONS; PZT; REFRACTIVE INDEX GRADIENTS; XRD;

REFRACTIVE INDEX; SOL-GELS; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

SOL-GEL PROCESS;

EID: 84874081367     PISSN: 17436753     EISSN: 17436761     Source Type: Journal    
DOI: 10.1179/1743676112Y.0000000019     Document Type: Article

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