Characterization of inhomogeneous dielectric films by spectroscopic ellipsometry

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 333-340

  Rivory, J ^a  

^a CNRS   (France)

Author keywords

Dielectric films; Ellipsometry; Index gradients; Inhomogeneous films

Indexed keywords

ELLIPSOMETRY; MATHEMATICAL MODELS; NUMERICAL METHODS; OPTICAL COATINGS; REFRACTIVE INDEX;

SPECTROSCOPIC ELLIPSOMETRY;

DIELECTRIC FILMS;

EID: 0032003727     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00842-0     Document Type: Article

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