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Nanotechnology

Volumn 24, Issue 7, 2013, Pages

In-plane organization of silicon nanocrystals embedded in SiO2 thin films

(7) Castro, C a Schamm Chardon, S a Pecassou, B a Andreozzi, A b Seguini, G b Perego, M b Benassayag, G a

a UNIVERSITÉ DE TOULOUSE (France)

b LABORATORIO MDM (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BURIED STRUCTURE; HEXAGONAL ARRAYS; ION BEAM SYNTHESIS; MICROELECTRONIC INDUSTRY; NANO SCALE; NANO-DEVICES; NANO-ORGANIZATION; NANO-POROUS FILMS; NANOMETRICS; SELF-ASSEMBLED; SI NANOCRYSTAL; SILICA MATRIX; SILICON NANOCRYSTALS; ULTRALOW ENERGY;

ION BEAMS; MICROELECTRONICS; NANOTECHNOLOGY; POLYMERIC FILMS; SILICA; THREE DIMENSIONAL COMPUTER GRAPHICS;

NANOCRYSTALS;

EID: 84873323611 PISSN: 09574484 EISSN: 13616528 Source Type: Journal
DOI: 10.1088/0957-4484/24/7/075302 Document Type: Article

Times cited : (12)

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