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Volumn 15, Issue 1, 2013, Pages 64-69
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Tuning effect of N2 on atmospheric-pressure cold plasma CVD of TiO2 photocatalytic films
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Author keywords
Atmospheric pressure cold plasma; Dielectric barrier discharge (DBD); Optical emission spectra (OES); Plasma CVD; TiO2 photocatalytic films
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Indexed keywords
COLD PLASMA-CVD;
COLD PLASMAS;
DIELECTRIC BARRIER DISCHARGES;
OPTICAL EMISSION SPECTRA;
PARTIAL PRESSURE RATIO;
PHOTOCATALYTIC ACTIVITIES;
PHOTOCATALYTIC FILM;
STOICHIOMETRIC RATIO;
TIO;
TUNING MECHANISM;
WORKING GAS;
ATMOSPHERIC PRESSURE;
DIELECTRIC DEVICES;
EMISSION SPECTROSCOPY;
FLOW CONTROL;
PHOTOCATALYSIS;
PLASMA CVD;
TITANIUM DIOXIDE;
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EID: 84873108144
PISSN: 10090630
EISSN: None
Source Type: Journal
DOI: 10.1088/1009-0630/15/1/11 Document Type: Article |
Times cited : (9)
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References (32)
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