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Volumn 6, Issue 9, 2009, Pages 575-582

Low temperature growth of photoactive titania by atmospheric pressure plasma

Author keywords

Atmospheric pressure glow discharges (apgd); CVD; Photoactivity; Titania

Indexed keywords

ATMOSPHERIC PRESSURE GLOW DISCHARGE; ATMOSPHERIC PRESSURE PLASMAS; CRYSTALLINE FILMS; CRYSTALLINITIES; DIFFERENT PRECURSORS; LOW TEMPERATURE GROWTH; PHOTOACTIVITY; TITANIA FILMS; XPS; XRD;

EID: 70450221077     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200900028     Document Type: Article
Times cited : (19)

References (34)
  • 1
    • 4143101020 scopus 로고
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    • J. J. C. S. M. Rossnagel, W. D. Westwood, Eds., William Andrew Publishing, Noyes
    • R. Reif, "Plasma Enhanced Chemical Vapour Deposition of Thin Films for Microelectronics" in: Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions, J. J. C. S. M. Rossnagel, W. D. Westwood, Eds., William Andrew Publishing, Noyes 1990, p. 260.
    • (1990) Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions , pp. 260
    • Reif, R.1
  • 24
    • 0003708256 scopus 로고
    • J. Chastain, R. C. King, Eds., Physical Electronic Inc, New York
    • Handbook of X-Ray Photoelectron Spectroscopy, J. Chastain, R. C. King, Eds., Physical Electronic Inc, New York 1995.
    • (1995) Handbook of X-Ray Photoelectron Spectroscopy
  • 29
    • 0003427458 scopus 로고
    • B. D. Cullity, Ed., AddisonWesley
    • Elements of X-Ray Diffraction, B. D. Cullity, Ed., AddisonWesley, 1978.
    • (1978) Elements of X-Ray Diffraction


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.