Low-loss amorphous silicon waveguides grown by PECVD on indium tin oxide

Journal of the European Optical Society

Volumn 5, Issue , 2010, Pages

  Rao, Sandro ^a   Della Corte, Francesco G ^a   Summonte, Caterina ^b  

^a UNIVERSITY MEDITERRANEA OF REGGIO CALABRIA   (Italy)

^b CNR Consiglio Nazionale delle Ricerche   (Italy)

Author keywords

Amorphous silicon; Plasma enhanced chemical vapour deposition; Spin on glass; Transparent conductive oxide; Waveguides

Indexed keywords

GLASS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPIN GLASS; SURFACE ROUGHNESS; TIN OXIDES; WAVEGUIDES;

AMORPHOUS SILICON WAVEGUIDES; HIGH EXTINCTION COEFFICIENTS; OPTICAL PROPAGATION LOSS; PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITIONS (PECVD); SPIN ON GLASS; TECHNOLOGICAL SOLUTION; TRANSPARENT CONDUCTIVE OXIDES;

AMORPHOUS SILICON;

EID: 79955008533     PISSN: None     EISSN: 19902573     Source Type: Journal    
DOI: 10.2971/jeos.2010.10039s     Document Type: Article

References (33)

1. G. T. Reed, and A. P. Knights, Silicon Photonics: An Introduction (John Wiley & Sons, New York, 2004).
2. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed optical modulator based on a metal-oxide-semiconductor capacitor" Nature 427, 615- 618 (2004).
3. D. Marris-Morini, X. Le Roux, L. Vivien, E. Cassan, D. Pascal, M. Halbwax, S. Maine, S. Laval, J. M. Fédéli, and J. F. Damlencourt, "Optical modulation by carrier depletion in a silicon PIN diode" Opt. Express 14, 10838-10843 (2006).
4. S. M. Weiss, H. Ouyang, J. Zhang, and P. M. Fauchet, "Electrical and thermal modulation of silicon photonic bandgap microcavities containing liquid crystals" Opt. Express 13, 1090-1097 (2005).
5. S. E. Holland, N. W. Wang, and W. W. Moses, "Development of low noise, back-side illuminated silicon photodiode arrays" IEEE T. Nucl. Sci. 44, 443-447 (1997).
6. B. Shi, P. S. Chang, K. Sun, Y. Xie, C. Radhakrishnan, and H. G. Mon-bouquette, "Monolithic integrated modulator on silicon for optical interconnects" IEEE Photonic. Tech. L. 19, 55-57 (2007).
7. th International Solid-State and Integrated Circuit Technology, 733-735 (IEEE, Beijing, 1995).
8. F. G. Della Corte, S. Rao, M. A. Nigro, F. Suriano, and C. Summonte, "Electro-optically induced absorption in α-Si:H/α-SiCN waveguiding multistacks" Opt. Express 16, 7540-7550 (2008).
9. M. A. Green, "Thin-film solar cells: review of materials, technologies and commercial status" J. Mater. Sci. 18, 15-19 (2007).
10. B. G. Lewis, and D. C. Paine, "Applications and processing of transparent conducting oxides" MRS Bull. 25, 22-27 (2000).
11. S. Diplas, A. Ulyashin, K. Maknys, A. E. Gunnaes, S. Jørgensen, D. Wright, J. F. Watts, A. Olsen, and T. G. Finstad, "On the processing-structure-property relationship of ITO layers deposited on crystalline and amorphous Si" Thin Solid Films 515, 8539-8543 (2007).
12. R. A. Synowicki, "Spectroscopic ellipsometry characterization of indium tin oxide film microstructure and optical constants" Thin Solid Films 313, 394-397 (1998).
13. G. Cocorullo, F. G. Della Corte, R. De Rosa, I. Rendina, A. Rubino, and E. Terzini, "Amorphous silicon-based guided-wave passive and active devices for silicon integrated optoelectronics" IEEE J. Sel. Top. Quant. 4, 997-1002 (1998).
14. S. K. Selvaraja, E. Sleeck, M. Schaekers, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, "Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry" Opt. Commun. 282, 1767-1770 (2009).
15. A. Harke, M. Krause, and J. Mueller, "Low-loss singlemode amorphous silicon waveguides" Electron. Lett. 41, 1377-1379 (2005).
16. M. J. A. de Dood, A. Polman, T. Zijlstra, and E. W. J. M. van der Drift, "Amorphous silicon waveguides for microphotonics" J. Appl. Phys. 92, 649-653 (2002).
17. J. M. Fedeli, L. Di Cioccio, D. Marris-Morini, L. Vivien, R. Orobtchouk, P. Rojo-Romeo, C. Seassald, and F. Mandorlo, "Development of silicon photonics devices using microelectronic tools for the integration on top of a CMOS wafer" Adv. Opt. Technol. 2008, 412518 (2008).
18. G. Cocorullo, F. G. Della Corte, R. De Rosa, I. Rendina, C. Minarini, A. Rubino, and E. Terzini, "Amorphous silicon waveguides and light modulators for integrated photonics realized by low-temperature plasma enhanced chemical-vapor deposition" Opt. Lett. 21, 2002- 2004 (1996).
19. M. Iodice, G. Mazzi, and L. Sirleto, "Thermo-optical static and dynamic analysis of a digital optical switch based on amorphous silicon waveguide" Opt. Express 14, 5266-5278 (2006).
20. J. Lan, and J. Kanicki, "ITO surface ball formation induced by atomic hydrogen in PECVD and HW-CVD tools" Thin Solid Films 304, 123- 129 (1997).
21. R. Banerjee, S. Ray, N. Basu, A. K. Batabyal, and A. K. Barua, "Degradation of tin-doped indium-oxide film in hydrogen and argon plasma" J. Appl. Phys. 62, 912-916 (1987).
22. K. K. Lee, D. R. Lim, and L. C. Kimerling, "Fabrication of ultralow-loss Si/SiO waveguides by roughness reduction" Opt. Lett. 26, 1888-1890 (2001).
23. P. Dumon, W. Bogaerts, J. van Campenhout, V. Wiaux, J. Wouters, S. Beckx, and R. Baets, "Low-loss photonic wires and compact ring resonators in silicon-on-insulator" in Proceedings to 2003 IEEE/LEOS Symposium Benelux Chapter, 5-8 (IEEE, Twente, 2003).
24. S. Kumar, and B. Drevillon, "A real time ellipsometry study of the growth of amorphous silicon on transparent conducting oxides" J. Appl. Physics 65, 3023-3034 (1989).
25. L. Meng, A. Maqarico, and R. Martins, "Study of annealed indium tin oxide films prepared by RF reactive magnetron sputtering" Vacuum 46, 673-680 (1995).
26. M. G. Zebaze Kana, E. Centurioni, D. Iencinella, and C. Summonte, "Influence of the sputtering system's vacuum level on the properties of indium tin oxide films" Thin Solid Films 500, 203-208 (2006).
27. E. Centurioni, "Generalized matrix method for calculation of internal light energy flux in mixed coherent and incoherent multilayers" Appl. Opt. 44, 7532-7539 (2005).
28. D. G. Stearns, D. P. Gaines, and D. W. Sweeney, "Nonspecular x-ray scattering in a multilayer-coated imaging system" J. Appl. Phys 84, 1003-1028 (1998).
29. G. Cancellieri, and U. Ravaioli, Measurements of Optical Fibers and Devices: Theory and Experiments (Artech House, Dedham, 1984).
30. RSoft Photonics CAD Layout User Guide (RSoft Design Group, Os-sining).
31. W. B. Jackson, N. M. Amer, A. C. Boccara, and D. Fournier, "Pho-tothermal deflection spectroscopy and detection" Appl. Opt. 20, 1333-1344 (1981).
32. S. P. Chan, C. E. Png, S. T. Lim, G. T. Reed, and V. M. N. Passaro, "Single-mode and polarization-independent silicon-on-insulator waveguides with small cross section" J. Lightwave Technol. 23, 2103-2111 (2005).
33. R. A. Soref, "Silicon-based optoelectronics" P. IEEE 81, 1687-1706 (1993).