SCOPUS 정보 검색 플랫폼

Volumn 5, Issue 3, 2013, Pages 984-990

Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity

(9) Faustini, Marco a Drisko, Glenna L a Letailleur, Alban A a,b Montiel, Rafael Salas c Boissière, Cédric a Cattoni, Andrea d Haghiri Gosnet, Anne Marie d Lerondel, Gilles c Grosso, David a

a Centre de Recherche Interdisciplinaire en Biologie (France)

b CNRS (France)

c UNIVERSITÉ DE TECHNOLOGIE DE TROYES (France)

d UNIV PARIS SUD (France)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH ASPECT RATIO; HIGH SELECTIVITY; LATERAL DIMENSION; NANO PATTERN; NANO-FABRICATION METHODS; NANOARRAYS; NANOMASKS; PROTECTIVE LAYERS; SELF-ASSEMBLED; SOL-GEL CHEMISTRY; TIO; TOP-DOWN TECHNOLOGY; ULTRA-THIN;

ASPECT RATIO; BUTADIENE; CALCIUM CHLORIDE; LIME; NANOTECHNOLOGY; OXIDE FILMS; SILICON; SOL-GELS; TITANIUM; TITANIUM DIOXIDE; WELLS;

DRY ETCHING;

CALCIUM DERIVATIVE; CALCIUM OXIDE; NANOMATERIAL; OXIDE; SILICON; TITANIUM;

ARTICLE; CHEMISTRY; CRYSTALLIZATION; MATERIALS TESTING; METHODOLOGY; MOLECULAR IMPRINTING; PARTICLE SIZE; PHOTOGRAPHY; SURFACE PROPERTY; ULTRASTRUCTURE;

CALCIUM COMPOUNDS; CRYSTALLIZATION; MATERIALS TESTING; MOLECULAR IMPRINTING; NANOSTRUCTURES; OXIDES; PARTICLE SIZE; PHOTOGRAPHY; SILICON; SURFACE PROPERTIES; TITANIUM;

MLCS; MLOWN;

EID: 84872735611 PISSN: 20403364 EISSN: 20403372 Source Type: Journal
DOI: 10.1039/c2nr33341d Document Type: Article

Times cited : (20)

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