SCOPUS 정보 검색 플랫폼

Volumn 109, Issue 1, 2011, Pages

High order symmetry interference lithography based nanoimprint

(6) Letailleur, Alban A a,b Nomenyo, Komla b McMurtry, Stefan b Barthel, Etienne a Søndergård, Elin a Lérondel, Gilles b

a SAINT GOBAIN RECHERCHE (France)

b UNIVERSITÉ DE TECHNOLOGIE DE TROYES (France)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH FIDELITY; HIGH ORDER SYMMETRY; HYBRID SOL-GEL; INTERFERENCE LITHOGRAPHY; LONG DISTANCES; NANO-IMPRINT; POTENTIAL SURFACES; PURE SILICA; PURE SILICON; THREE-DIMENSIONAL STRUCTURE; TRANSFER LAYERS; TWO-STEP PROCESS;

MECHANICAL STABILITY; SILICA;

NANOIMPRINT LITHOGRAPHY;

EID: 78751549203 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3530729 Document Type: Article

Times cited : (8)

References (14)

1
- 0030570065
- S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Science 272, 85 (1996).
- (1996) Science , vol.272 , pp. 85
- Chou, S.Y.¹ Krauss, P.R.² Renstrom, P.J.³

2
- 3142684522
- C. R. Martin and I. A. Aksay, J. Electroceram. 12, 53 (2004).
- (2004) J. Electroceram. , vol.12 , pp. 53
- Martin, C.R.¹ Aksay, I.A.²

3
- 65549165316
- C. Acikgoz, M. A. Hempenius, G. J. Vancso, and J. Huskens, Nanotechnology 20, 135304 (2009).
- (2009) Nanotechnology , vol.20 , pp. 135304
- Acikgoz, C.¹ Hempenius, M.A.² Vancso, G.J.³ Huskens, J.⁴

4
- 60549113048
- T. Han, S. Madden, M. Zhang, R. Charters, and B. Luther-Davies, Opt. Express 17, 2623 (2009).
- (2009) Opt. Express , vol.17 , pp. 2623
- Han, T.¹ Madden, S.² Zhang, M.³ Charters, R.⁴ Luther-Davies, B.⁵

5
- 60349131290
- C. Peroz, V. Chaveau, E. Bartel, and E. Sondergard, Adv. Mater. 21, 555 (2009).
- (2009) Adv. Mater , vol.21 , pp. 555
- Peroz, C.¹ Chaveau, V.² Bartel, E.³ Sondergard, E.⁴

6
- 78751483884
- X. Jia, T. Jia, Y. Zhang, P. Xiong, D. Feng, Z. Sun, and Z. Xu, Opt. Express 18, 14401 (2010).
- (2010) Opt. Express , vol.18 , pp. 14401
- Jia, X.¹ Jia, T.² Zhang, Y.³ Xiong, P.⁴ Feng, D.⁵ Sun, Z.⁶ Xu, Z.⁷

7
- 13244278371
- S. Park, H. Schift, H. H. Solak, and J. Gobrecht, J. Vac. Sci. Technol. B 22, 3246 (2004).
- (2004) J. Vac. Sci. Technol B , vol.22 , pp. 3246
- Park, S.¹ Schift, H.² Solak, H.H.³ Gobrecht, J.⁴

8
- 0942289223
- C. H. Chang, R. K. Heilmann, R. C. Fleming, J. Carter, E. Murphy, T. C. Bailey, J. G. Ekerdt, R. D. Frankel, and R. Voisin, J. Vac. Sci. Technol. B 21, 2755 (2003).
- (2003) J. Vac Sci. Technol. B , vol.21 , pp. 2755
- Chang, C.H.¹ Heilmann, R.K.² Fleming, R.C.³ Carter, J.⁴ Murphy, E.⁵ Bailey, T.C.⁶ Ekerdt, J.G.⁷ Frankel, R.D.⁸ Voisin, R.⁹

9
- 34547363218
- M. Lamblet, E. Verneuil, T. Vilmin, A. Buguin, P. Silberzan, and L. Léger, Langmuir 23, 6966 (2007).
- (2007) Langmuir , vol.23 , pp. 6966
- Lamblet, M.¹ Verneuil, E.² Vilmin, T.³ Buguin, A.⁴ Silberzan, P.⁵ Léger, L.⁶

10
- 42149109777
- K. Bao, X. N. Kang, B. Zhang, T. Dai, Y. J. Sun, G. Fu, G. J. Lian, G. C. Xiong, G. Y. Zhang, and Y. Chen, Appl. Phys. Lett. 92, 141104 (2008).
- (2008) Appl. Phys. Lett. , vol.92 , pp. 141104
- Bao, K.¹ Kang, X.N.² Zhang, B.³ Dai, T.⁴ Sun, Y.J.⁵ Fu, G.⁶ Lian, G.J.⁷ Xiong, G.C.⁸ Zhang, G.Y.⁹ Chen, Y.¹⁰

11
- 77951607303
- W. Zhou, G. Min, Z. Song, J. Zhang, Y. Liu, and J. Zhang, Nanotechnology 21, 205304 (2010).
- (2010) Nanotechnology , vol.21 , pp. 205304
- Zhou, W.¹ Min, G.² Song, Z.³ Zhang, J.⁴ Liu, Y.⁵ Zhang, J.⁶

12
- 77956690358
- K. Wang, Phys. Rev. B 82, 045119 (2010).
- (2010) Phys. Rev. B , vol.82 , pp. 045119
- Wang, K.¹

13
- 77952690533
- L. Cerdán, A. Costela, I. García-Moreno, O. García, and R. Sastre, Opt. Express 18, 10247 (2010).
- (2010) Opt. Express , vol.18 , pp. 10247
- Cerdán, L.¹ Costela, A.² García-Moreno, I.³ García, O.⁴ Sastre, R.⁵

14
- 77952471391
- A. Letailleur, J. Teisseire, N. Chemin, E. Barthel, and E. Søndergård, Chem. Mater. 22, 3143 (2010).
- (2010) Chem. Mater. , vol.22 , pp. 3143
- Letailleur, A.¹ Teisseire, J.² Chemin, N.³ Barthel, E.⁴ Søndergård, E.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.