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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 31, Issue 1, 2013, Pages

Performance comparison of front- and back-illuminated AlGaN-based metal-semiconductor-metal solar-blind ultraviolet photodetectors

(8) Wang, Guosheng a Xie, Feng a Lu, Hai a Chen, Dunjun a Zhang, Rong a Zheng, Youdou a Li, Liang b Zhou, Jianjun b

a NANJING UNIVERSITY (China)

b NANJING ELECTRONIC DEVICES INSTITUTE (China)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTODETECTORS; PHOTONS; SAPPHIRE;

BACK-ILLUMINATED; BACK-ILLUMINATION; COLLECTION EFFICIENCY; LOW BIAS; METAL SEMICONDUCTOR METAL; OPERATION MODE; PERFORMANCE COMPARISON; PHOTOCARRIER; PHOTORESPONSES; PHOTORESPONSIVITY; REJECTION RATIOS; SAPPHIRE SUBSTRATES; SOLAR-BLIND; SURFACE REFLECTIVITY; ULTRA-VIOLET PHOTODETECTORS;

METALS;

EID: 84872733295 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.4769250 Document Type: Article

Times cited : (26)

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