Low temperature diamond growth by linear antenna plasma CVD over large area

Physica Status Solidi (B) Basic Research

Volumn 249, Issue 12, 2012, Pages 2600-2603

  Izak, Tibor ^a   Babchenko, Oleg ^a   Varga, Marian ^a,b   Potocky, Stepan ^a   Kromka, Alexander ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

Activation energy; Growth kinetics; Linear antenna microwave CVD; Low temperature; Polycrystalline diamond films

Indexed keywords

ACTIVATION ENERGY; ANTENNAS; ARRHENIUS PLOTS; DIAMOND FILMS; GROWTH KINETICS; MORPHOLOGY; PLASMA CVD; SUBSTRATES; SURFACE CHEMISTRY; TEMPERATURE;

ACTIVATION ENERGIES (EA); LOW TEMPERATURES; MICROWAVE CVD; MICROWAVE PLASMA SYSTEMS; POLYCRYSTALLINE DIAMOND FILMS; POLYCRYSTALLINE DIAMONDS; SUBSTRATE TEMPERATURE; TEMPERATURE SENSITIVE SUBSTRATES;

GROWTH RATE;

EID: 84872411799     PISSN: 03701972     EISSN: 15213951     Source Type: Journal    
DOI: 10.1002/pssb.201200103     Document Type: Article

References (21)

1. P. W. May, Philos. Trans. R. Soc. Lond. Ser. A 358, 473 (2000).
2. X. Xiao, J. Birrell, and J. A. Carlisle, J. Appl. Phys. 96, 15 (2004).
3. K. Tsugawa, M. Ishihara, and M. Hasegawa, Phys. Rev. B 82, 125460 (2010).
4. O. Babchenko, Z. Remes, and A. Kromka, Phys. Status Solidi B 248, 2736 (2011).
5. A. Kromka, O. Babchenko, and B. Rezek, in: Conference Proceedings of 3rd International Conference - NANOCON 2011, Sept. 21-23, 2011, Brno, Czech Republic, ISBN 978-80-87294-23-9.
6. J. R. Petherbridge, P. W. May, and M. N. R. Ashfold, J. Appl. Phys. 89, 1484 (2001).
7. Ch. F. Chen, Sh. H. Chert, and S. E. Hsu, Diamond Relat. Mater. 3, 443 (1994).
8. J. Stiegler, T. Lang, and E. Blank, Diamond Relat. Mater. 5, 226 (1996).
9. A. Kromka, O. Babchenko, and B. Rezek, Vacuum 86, 776 (2012).
10. K. Tsugawa, S. Kawaki, and M. Hasegawa, Diamond Relat. Mater. 20, 833 (2011).
11. M. Ihara, H. Macho, and H. Komiyama, Diamond Relat. Mater. 1, 187 (1992).
12. S. Potocky, A. Kromka, and M. Vanecek, Phys. Status Solidi A 203, 3011 (2006).
13. L. Gueroudji and N. M. Hwang, Diamond Relat. Mater. 9, 205 (2000).
14. T. G. McCauley, D. M. Gruen, and A. R. Krauss, Appl. Phys. Lett. 73, 1646 (1998).
15. J. Lee, B. Hong, and R. W. Collins, J. Appl. Phys. 80, 6489 (1996).
16. Z. Remes, H. Kozak, and A. Kromka, Diamond Relat. Mater. 20, 882 (2011).
17. D. Das, V. Jayaseelan, and R. N. Sing, Diamond Relat. Mater. 15, 1336 (2006).
18. W. Kulisch, C. Popov, and V. Vorlicek, Surf. Coat. Technol. 200, 4731 (2006).
19. D. C. Barbosa and F. A. Almeida, Diamond Relat. Mater. 18, 1283 (2009).
20. K. A. Snail and Ch. M. Marksa, Appl. Phys. Lett. 60, 3135 (1992).
21. A. Yamaguchi, M. Ihara, and H. Komiyama, Appl. Phys. Lett. 64, 1306 (1994).