메뉴 건너뛰기




Volumn 82, Issue 12, 2010, Pages

Nanocrystalline diamond film growth on plastic substrates at temperatures below 100°C from low-temperature plasma

Author keywords

[No Author keywords available]

Indexed keywords


EID: 77957726302     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.82.125460     Document Type: Article
Times cited : (76)

References (46)
  • 3
    • 0009661538 scopus 로고
    • 10.1126/science.241.4868.913
    • J. C. Angus and C. C. Hayman, Science 241, 913 (1988). 10.1126/science.241.4868.913
    • (1988) Science , vol.241 , pp. 913
    • Angus, J.C.1    Hayman, C.C.2
  • 9
    • 35348897337 scopus 로고    scopus 로고
    • Synthesis of diamond at sub 300°C substrate temperature
    • DOI 10.1016/j.diamond.2007.08.038, PII S0925963507003731
    • F. Piazza and G. Morell, Diamond Relat. Mater. 16, 1950 (2007). 10.1016/j.diamond.2007.08.038 (Pubitemid 47576585)
    • (2007) Diamond and Related Materials , vol.16 , Issue.11 , pp. 1950-1957
    • Piazza, F.1    Morell, G.2
  • 14
    • 33847743039 scopus 로고    scopus 로고
    • Control of plasma space potentials and chemical vapor deposition of nanocrystalline diamond films in surface-wave excited low-pressure plasmas
    • DOI 10.1063/1.2409761
    • J. Kim and M. Katsurai, J. Appl. Phys. 101, 023301 (2007). 10.1063/1.2409761 (Pubitemid 46372754)
    • (2007) Journal of Applied Physics , vol.101 , Issue.2 , pp. 023301
    • Kim, J.1    Katsurai, M.2
  • 16
    • 0030173670 scopus 로고    scopus 로고
    • Dissociation kinetics of molecular hydrogen in a microwave plasma and its influence on the hydrogen content in diamond films
    • DOI 10.1016/0038-1098(96)00040-3, PII S0038109896000403
    • T. Sharda, G. S. Misra, D. K. Avasthi, and G. K. Mehta, Solid State Commun. 98, 879 (1996). 10.1016/0038-1098(96)00040-3 (Pubitemid 126359661)
    • (1996) Solid State Communications , vol.98 , Issue.10 , pp. 879-883
    • Sharda, T.1    Misra, D.S.2    Avasthi, D.K.3    Mehta, G.K.4
  • 17
    • 0025535549 scopus 로고
    • 10.1016/0042-207X(90)93956-J
    • T. Anthony, Vacuum 41, 1356 (1990). 10.1016/0042-207X(90)93956-J
    • (1990) Vacuum , vol.41 , pp. 1356
    • Anthony, T.1
  • 26
  • 32
  • 34
    • 0001170945 scopus 로고    scopus 로고
    • 10.1103/PhysRevB.54.2150
    • M. Y. Gamarnik, Phys. Rev. B 54, 2150 (1996). 10.1103/PhysRevB.54.2150
    • (1996) Phys. Rev. B , vol.54 , pp. 2150
    • Gamarnik, M.Y.1
  • 38
    • 0033514595 scopus 로고    scopus 로고
    • 10.1016/S0022-0248(98)01034-3
    • N. M. Hwang, J. Cryst. Growth 198-199, 945 (1999). 10.1016/S0022-0248(98) 01034-3
    • (1999) J. Cryst. Growth , vol.198-199 , pp. 945
    • Hwang, N.M.1
  • 39
  • 40
  • 41
    • 0012753759 scopus 로고
    • 10.1016/0022-0248(87)90090-X
    • S. Mitura, J. Cryst. Growth 80, 417 (1987). 10.1016/0022-0248(87)90090-X
    • (1987) J. Cryst. Growth , vol.80 , pp. 417
    • Mitura, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.