Linear antenna microwave plasma CVD deposition of diamond films over large areas

Vacuum

Volumn 86, Issue 6, 2012, Pages 776-779

  Kromka, A ^a   Babchenko, O ^a   Izak, T ^a   Hruska, K ^a   Rezek, B ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

Large area growth; Nanocrystalline diamond; Plasma enhanced CVD; Raman spectroscopy; SEM

Indexed keywords

CRYSTAL SIZE; DIAMOND THIN FILM; GAS COMPOSITIONS; LINEAR ANTENNAS; METHANE CONCENTRATIONS; MICROWAVE PLASMA CVD; NANOCRYSTALLINE DIAMONDS; PLASMA-ENHANCED CVD; RATE INCREASE; SURFACE CRYSTALS; TOTAL GAS PRESSURE; TOTAL PRESSURE;

ANTENNAS; CARBON DIOXIDE; CHEMICAL VAPOR DEPOSITION; DEPOSITION; DIAMONDS; FILM GROWTH; GAS MIXTURES; GASES; GRAIN SIZE AND SHAPE; HYDROGEN; METHANATION; METHANE; MICROWAVES; PLASMA DEPOSITION; PLASMAS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

DIAMOND FILMS;

EID: 84856546921     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.07.008     Document Type: Conference Paper

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