Local piezoelectric properties of ZnO thin films prepared by RF-plasma-assisted pulsed-laser deposition method

Nanotechnology

Volumn 21, Issue 23, 2010, Pages

  Bdikin, I K ^a   Gracio, J ^a   Ayouchi, R ^b   Schwarz, R ^b   Kholkin, A L ^c  

^a UNIVERSITY OF AVEIRO   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^c UNIVERSITY OF AVEIRO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

AS-DEPOSITED FILMS; BAND GAPS; CORNING GLASS; FERROELECTRIC PROPERTY; GRAIN STRUCTURES; HIGH VOLTAGE; IN-PLANE; OUT-OF-PLANE; PIEZOELECTRIC PROPERTY; PIEZORESPONSE; POLYCRYSTALLINE; POLYCRYSTALLINE ZNO; PREFERENTIAL ORIENTATION; RF PLASMA; ROOM TEMPERATURE; THREE COMPONENT; X-RAY DIFFRACTION MEASUREMENTS; ZNO; ZNO THIN FILM;

DEPOSITION; GLASS LASERS; HYSTERESIS; MAGNETIC MATERIALS; OXIDE FILMS; PIEZOELECTRICITY; PLASMA DEPOSITION; PULSED LASER DEPOSITION; PULSED LASERS; SINGLE CRYSTALS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION; ZINC; ZINC OXIDE;

FERROELECTRIC FILMS;

EID: 77952400610     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/23/235703     Document Type: Article

References (30)

1. Wang Z L 2004 J. Phys.: Condens. Matter 16 R829
2. Fonoberov V A and Balandin A A 2006 J. Nanoelectron. Optoelectron. 1 19
3. Kalinina E V, Cherenkov A E, Onushkin G A, Alivov Y I, Look D C, Ataev B M, Oamev A K and Chukichev C M 2005 Zinc oxide-a Material for Micro-and Optoelectronic Applications ed N K Nickel and E Terukov (Dordrecht: Springer) p211
4. Wang X, Summers C J and Wang Z L 2004 Nano Lett. 4 423
5. zgür, Alivov Ya I, Liu C, Teke A, Reshchikov M A, Dogan S, Avrutin V, Cho S-J and Morkoç H 2005 J. Appl. Phys. 98 041301
6. Hickermell F S 1976 Proc. IEEE 64 631
7. Wang Z L 2007 Mater. Today 10 20
8. Scrymgeour D A, Sounart T L, Simmons N C and Hsu JWP 2007 J. Appl. Phys. 101 014316
9. Xiang H J, Yang J, Hou J G and Zhu Q 2006 Appl. Phys. Lett. 89 223111
10. Zhao M H, Wang Z L and Mao S X 2004 Nano Lett. 4 587
11. Wang X B, Song C, Li D M, Geng K W, Zeng F and Pan F 2006 Appl. Surf. Sci. 253 1639
12. Yang Y C, Song C, Wang X H, Zeng F and Pan F 2008 Appl. Phys. Lett. 92 012907
13. Cracium F, Dinescu M, Verardi P, Scaresorianu N, Galassi C and Piazza D 2004 Ferroelectrics 302 313
14. Sanguino P, Koynov S, Niehus M, Melo L, Schwarz R, Alves H and Meyer B K 2001 Mater. Res. Soc. Symp. Proc. 693 81
15. Kalinin S V, Setter N and Kholkin A L (ed) 2009 Electromechanics on the nanometer scale: emerging phenomena, devices, and applications Mater. Res. Soc. Bull. 34 634
16. Jesse S, Lee H and Kalinin S V 2006 Rev. Sci. Instrum. 77 073702
17. Kholkin A L, Kalinin S V, Roelofs A and Gruverman A 2006 Scanning Probe Microscopy: Electrical and Electromechanical Phenomena at the Nanoscale vol 1 ed S Kalinin and A Gruverman (Berlin: Springer)
18. Srikant V and Clarke D R 1998 J. Appl. Phys. 83 5447
19. Yan X, Li Zh, Zou Ch, Li S, Yang J, Chen R, Han J and Gao W 2010 J. Phys. Chem. C 114 1436
20. Crisler D F, Cupal J J and Moore A B 1968 Proc. IEEE 56 225
21. Royer D and Kmetik V 1992 Electron. Lett. 28 1828
22. Kholkin A, Amdursky N, Bdikin I, Gazit E and Rosenman G 2010 ACS Nano 4 610
23. Landolt H and Bornstein R 1981 Numerical Data and Functional Relationships in Science and Technology (New Series vol III/16) (Berlin: Springer)
24. Nagarajan V, Jenkins I G, Alpay S P, Li H, Aggarwal S, Salamanca-Riba L, Roytburd A L and Ramesh R 1999 J. Appl. Phys. 86 595
25. Tagantsev A 2008 Appl. Phys. Lett. 93 202905
26. Gupta V and Mansingh A 1998 ISAF XI'98: Proc. XI IEEE Symp. on Applications of Ferroelectrics (Montreux, Aug. 1998) p113
27. Damjanovic D 2005 Science of Hysteresis vol III ed G Bertotti and I Mayergoyz (Amsterdam: Elsevier) chapter 4 (Hysteresis in Piezoelectric and Ferroelectric Materials) pp337-465
28. Pearton S J, Norton D P, Ip K, Heo Y W and Steiner T 2005 Prog. Mater. Sci. 50 293
29. Eng L M, Güntherodt H-J, Schneider G A, Kopke U and Saldãa J M 1999 Appl. Phys. Lett. 74 233
30. Kalinin S V, Rodriguez B J, Jesse S, Shin J, Baddorf A P, Gupta P, Jain H, Williams D B and Gruverman A 2006 Microsc. Microanal. 12 1