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Volumn 11, Issue 9, 2011, Pages 3513-3518

Bringing order to the world of nanowire devices by phase shift lithography

Author keywords

alignment; lithography; patterning; phase shift; Si nanowires; ZnO nanowires

Indexed keywords

DEVICE FABRICATIONS; ELECTRICAL CHARACTERIZATION; FABRICATION PROCESS; HETEROJUNCTION DIODES; MASS PRODUCTION; NANOWIRE DEVICES; PATTERNING; PHASE SHIFT LITHOGRAPHY; SCALING DOWN; SEMICONDUCTOR NANOWIRE; SI NANOWIRES; TECHNOLOGICAL BREAKTHROUGHS; ZNO NANOWIRES;

EID: 80052810212     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl102103w     Document Type: Article
Times cited : (24)

References (26)
  • 2
    • 35348984409 scopus 로고    scopus 로고
    • Coaxial silicon nanowires as solar cells and nanoelectronic power sources
    • DOI 10.1038/nature06181, PII NATURE06181
    • Tian, B.; Zheng, X.; Kempa, T. J.; Fang, Y.; Yu, N.; Yu, G.; Huang, J.; Lieber, C. M. Coaxial silicon nanowires as solar cells and nanoelectronic power sources Nature 2007, 449, 885-889 (Pubitemid 47598610)
    • (2007) Nature , vol.449 , Issue.7164 , pp. 885-889
    • Tian, B.1    Zheng, X.2    Kempa, T.J.3    Fang, Y.4    Yu, N.5    Yu, G.6    Huang, J.7    Lieber, C.M.8
  • 3
    • 27144513329 scopus 로고    scopus 로고
    • Multiplexed electrical detection of cancer markers with nanowire sensor arrays
    • DOI 10.1038/nbt1138, PII N1138
    • Zheng, G.; Patolsky, F.; Cui, Y.; Wang, W. U.; Lieber, C. M. Multiplexed electrical detection of cancer markers with nanowire sensor arrays Nat. Biotechnol. 2005, 23, 1294-1301 (Pubitemid 41486858)
    • (2005) Nature Biotechnology , vol.23 , Issue.10 , pp. 1294-1301
    • Zheng, G.1    Patolsky, F.2    Cui, Y.3    Wang, W.U.4    Lieber, C.M.5
  • 5
    • 61849132250 scopus 로고    scopus 로고
    • The impact of nanocontact on nanowire based nanoelectronics
    • Lin, Y.; Jian, W. The impact of nanocontact on nanowire based nanoelectronics Nano Lett. 2008, 8, 3146-3150
    • (2008) Nano Lett. , vol.8 , pp. 3146-3150
    • Lin, Y.1    Jian, W.2
  • 6
    • 40149089679 scopus 로고    scopus 로고
    • Electroluminescence from ZnO nanowires with a p-ZnO film/n-ZnO nanowire homojunction
    • Sun, H.; Zhang, Q.; Zhang, J.; Deng, T.; Wu, J. Electroluminescence from ZnO nanowires with a p-ZnO film/n-ZnO nanowire homojunction Appl. Phys. B: Laser Opt. 2008, 90, 543-546
    • (2008) Appl. Phys. B: Laser Opt. , vol.90 , pp. 543-546
    • Sun, H.1    Zhang, Q.2    Zhang, J.3    Deng, T.4    Wu, J.5
  • 7
    • 67749091070 scopus 로고    scopus 로고
    • Imaging single ZnO vertical nanowire laser cavities using UV-laser scanning confocal microscopy
    • Gargas, D. J.; Toimil-Molares, M. E.; Yang, P. Imaging single ZnO vertical nanowire laser cavities using UV-laser scanning confocal microscopy J. Am. Chem. Soc. 2009, 131, 2125-2127
    • (2009) J. Am. Chem. Soc. , vol.131 , pp. 2125-2127
    • Gargas, D.J.1    Toimil-Molares, M.E.2    Yang, P.3
  • 8
    • 0035793378 scopus 로고    scopus 로고
    • Functional nanoscale electronic devices assembled using silicon nanowire building blocks
    • DOI 10.1126/science.291.5505.851
    • Cui, Y.; Lieber, C. M. Functional nanoscale electronic devices assembled using silicon nanowire building blocks Science 2001, 291, 851-853 (Pubitemid 32120751)
    • (2001) Science , vol.291 , Issue.5505 , pp. 851-853
    • Cui, Y.1    Lieber, C.M.2
  • 9
    • 33646749181 scopus 로고    scopus 로고
    • Semiconductor nanowires: From self-organization to patterned growth
    • DOI 10.1002/smll.200500495
    • Fan, H. J.; Werner, P.; Zacharias, M. Semiconductor nanowires: From self-organization to growth control Small 2006, 2, 700-717 (Pubitemid 43745137)
    • (2006) Small , vol.2 , Issue.6 , pp. 700-717
    • Fan, H.J.1    Werner, P.2    Zacharias, M.3
  • 11
    • 31144452755 scopus 로고    scopus 로고
    • Pattern and feature designed growth of ZnO nanowire arrays for vertical devices
    • DOI 10.1021/jp055180j
    • He, J. H.; Hsu, J. H.; Wang, C. W.; Lin, H. N.; Chen, L. J.; Wang, Z. L. Pattern and feature designed growth of ZnO nanowire arrays for vertical devices J. Phys. Chem. B 2006, 110, 50-53 (Pubitemid 43133519)
    • (2006) Journal of Physical Chemistry B , vol.110 , Issue.1 , pp. 50-53
    • He Jr., H.1    Hsu, J.H.2    Wang, C.W.3    Lih, H.N.4    Chen, L.J.5    Wang, Z.L.6
  • 13
    • 0036643637 scopus 로고    scopus 로고
    • Investigation of phase shift mask distortion effect
    • DOI 10.1016/S0167-9317(02)00569-5, PII S0167931702005695
    • Du, J.; Cui, Z.; Yuan, X.; Guo, Y. Investigation of phase shift mask distortion effect Microelectron. Eng. 2002, 61, 265-270 (Pubitemid 34613374)
    • (2002) Microelectronic Engineering , vol.61-62 , pp. 265-270
    • Du, J.1    Cui, Z.2    Yuan, X.C.3    Guo, Y.4
  • 15
    • 33645526438 scopus 로고    scopus 로고
    • Experimental and computational studies of phase shift lithography with binary elastomeric masks
    • Maria, J.; Malyarchuk, V.; White, J.; Rogers, J. A. Experimental and computational studies of phase shift lithography with binary elastomeric masks J. Vac. Sci. Technol., B 2006, 24, 828-835
    • (2006) J. Vac. Sci. Technol., B , vol.24 , pp. 828-835
    • Maria, J.1    Malyarchuk, V.2    White, J.3    Rogers, J.A.4
  • 17
    • 0038057697 scopus 로고    scopus 로고
    • Patterning spherical surfaces at the two-hundred-nanometer scale using soft lithography
    • Paul, K. E.; Prentiss, M.; Whitesides, G. M. Patterning spherical surfaces at the two-hundred-nanometer scale using soft lithography Adv. Funct. Mater. 2003, 13, 259-263
    • (2003) Adv. Funct. Mater. , vol.13 , pp. 259-263
    • Paul, K.E.1    Prentiss, M.2    Whitesides, G.M.3
  • 18
    • 67649386594 scopus 로고    scopus 로고
    • Physically processed Ag-doped ZnO nanowires for all-ZnO p-n diodes
    • Song, Y.; Kim, K.; Ahn, J. P.; Jang, G.; Lee, S. Y. Physically processed Ag-doped ZnO nanowires for all-ZnO p-n diodes Nanotechnology 2009, 20, 275606
    • (2009) Nanotechnology , vol.20 , pp. 275606
    • Song, Y.1    Kim, K.2    Ahn, J.P.3    Jang, G.4    Lee, S.Y.5
  • 19
    • 42349094256 scopus 로고    scopus 로고
    • ZnO nanowire network transistor fabrication on a polymer substrate by low-temperature, all-inorganic nanoparticle solution process
    • Ko, S. H.; Park, I.; Pan, H.; Misra, N.; Rogers, M. S.; Grigoropoulos, C. P.; Pisano, A. P. ZnO nanowire network transistor fabrication on a polymer substrate by low-temperature, all-inorganic nanoparticle solution process Appl. Phys. Lett. 2008, 92, 154102
    • (2008) Appl. Phys. Lett. , vol.92 , pp. 154102
    • Ko, S.H.1    Park, I.2    Pan, H.3    Misra, N.4    Rogers, M.S.5    Grigoropoulos, C.P.6    Pisano, A.P.7
  • 20
    • 0035126240 scopus 로고    scopus 로고
    • Catalytic growth of zinc oxide nanowires by vapor transport
    • DOI 10.1002/1521-4095(200101)13:2<113::AID-ADMA113>3.0.CO;2-H
    • Huang, M. H.; Wu, Y.; Feick, H.; Tran, N.; Weber, E.; Yang, P. Catalytic growth of zinc oxide nanowires by vapor transport Adv. Mater. 2001, 13, 113-116 (Pubitemid 32188783)
    • (2001) Advanced Materials , vol.13 , Issue.2 , pp. 113-116
    • Huang, M.H.1    Wu, Y.2    Feick, H.3    Tran, N.4    Weber, E.5    Yang, P.6
  • 21
    • 49549114227 scopus 로고    scopus 로고
    • Manipulation of crawling growth for the formation of sub-millimeter long ZnO nanowalls
    • Fan, H. J.; Zacharias, M. Manipulation of crawling growth for the formation of sub-millimeter long ZnO nanowalls J. Mater. Sci. Technol. 2008, 24, 589-593
    • (2008) J. Mater. Sci. Technol. , vol.24 , pp. 589-593
    • Fan, H.J.1    Zacharias, M.2
  • 24
    • 0040990218 scopus 로고
    • Experiments on Ge-GaAs heterojunctions
    • Anderson, R. L. Experiments on Ge-GaAs heterojunctions Solid-State Electron. 1962, 5, 341-351
    • (1962) Solid-State Electron. , vol.5 , pp. 341-351
    • Anderson, R.L.1
  • 26
    • 0037867953 scopus 로고
    • Forward-voltage capacitance of heterojunction space-charge regions
    • Liou, J. J.; Lindholm, F. A.; Malocha, D. C. Forward-voltage capacitance of heterojunction space-charge regions J. Appl. Phys. 1988, 63, 5015-5022
    • (1988) J. Appl. Phys. , vol.63 , pp. 5015-5022
    • Liou, J.J.1    Lindholm, F.A.2    Malocha, D.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.