Oxide coating of alumina nanoporous structure using ALD to produce highly porous spinel

Chemical Vapor Deposition

Volumn 18, Issue 10-12, 2012, Pages 315-325

  Rauwel, Erwan ^a   Nilsen, Ola ^a   Rauwel, Protima ^a   Walmsley, John Charles ^b   Frogner, Heidi Berge ^a   Rytter, Erling ^c   Fjellvåg, Helmer ^a  

^a UNIVERSITY OF OSLO   (Norway)

^b NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

^c STATOIL   (Norway)

Author keywords

ALD; Conformal coating; Nanoporous particles; Spinel; Zinc oxide

Indexed keywords

ALD; ALUMINA PARTICLES; ALUMINUM MEMBRANES; COATED LAYERS; COBALT OXIDES; COMPLEX SHAPES; CONFORMAL COATINGS; CONFORMALITY; HIGH ASPECT RATIO; KIRKENDALL; NANO-POROUS; NANOPOROUS MATERIALS; NANOPOROUS STRUCTURES; OXIDE COATING; OXIDE THIN FILMS; SPINEL; SPINEL PARTICLES; SPINEL PHASIS; ZNO;

ALUMINA; ALUMINUM; ALUMINUM COATINGS; ASPECT RATIO; COBALT; COBALT COMPOUNDS; DEPOSITION; NANOSTRUCTURED MATERIALS; POROUS MATERIALS; PROTECTIVE COATINGS; THIN FILMS; VAPOR DEPOSITION; ZINC OXIDE;

ATOMIC LAYER DEPOSITION;

EID: 84871658756     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.201207005     Document Type: Article

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