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Volumn 178-179, Issue , 2011, Pages 130-135

Electronic properties of ZnO/Si heterojunction prepared by ALD

Author keywords

DLTS; Interface; Silicon; Zinc oxide

Indexed keywords

ATOMIC LAYER DEPOSITION; ATOMIC SPECTROSCOPY; CRYSTAL ORIENTATION; DEEP LEVEL TRANSIENT SPECTROSCOPY; DEFECTS; ELECTRIC RECTIFIERS; ELECTRONIC PROPERTIES; INTERFACES (MATERIALS); IODINE; OHMIC CONTACTS; POWER QUALITY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON; VANADIUM; ZINC OXIDE; AFTER-HEAT TREATMENT; CAPACITANCE; HETEROJUNCTIONS; II-VI SEMICONDUCTORS; SILICON COMPOUNDS;

EID: 80053259903     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.178-179.130     Document Type: Conference Paper
Times cited : (8)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.