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Volumn 178-179, Issue , 2011, Pages 130-135
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Electronic properties of ZnO/Si heterojunction prepared by ALD
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Author keywords
DLTS; Interface; Silicon; Zinc oxide
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Indexed keywords
ATOMIC LAYER DEPOSITION;
ATOMIC SPECTROSCOPY;
CRYSTAL ORIENTATION;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
DEFECTS;
ELECTRIC RECTIFIERS;
ELECTRONIC PROPERTIES;
INTERFACES (MATERIALS);
IODINE;
OHMIC CONTACTS;
POWER QUALITY;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON;
VANADIUM;
ZINC OXIDE;
AFTER-HEAT TREATMENT;
CAPACITANCE;
HETEROJUNCTIONS;
II-VI SEMICONDUCTORS;
SILICON COMPOUNDS;
AFTER-HEAT TREATMENT;
CAPACITANCE VOLTAGE;
CONDUCTION BAND EDGE;
CURRENT VOLTAGE;
ELECTRICALLY ACTIVE DEFECTS;
ENERGY POSITION;
INTERFACE DEFECTS;
PREFERRED ORIENTATIONS;
ZNO;
ZNO FILMS;
ZNO/P-SI;
CURRENT RECTIFICATIONS;
DLTS MEASUREMENTS;
HETEROJUNCTIONS;
WIDE BAND GAP SEMICONDUCTORS;
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EID: 80053259903
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: 10.4028/www.scientific.net/SSP.178-179.130 Document Type: Conference Paper |
Times cited : (8)
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References (13)
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