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Volumn 90, Issue , 2013, Pages 148-151
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Correlation between nanomechanical and piezoelectric properties of thin films: An experimental and finite element study
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Author keywords
Elastic modulus; Instrumented indentation method (IIM); Nanoindentation; Piezoelectric response; Thin films
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Indexed keywords
ELASTIC MODULI;
ENERGY CONVERSION;
ENERGY HARVESTING;
FERROELECTRIC CERAMICS;
FINITE ELEMENT METHOD;
NANOINDENTATION;
PIEZOELECTRICITY;
SEMICONDUCTING LEAD COMPOUNDS;
STRONTIUM TITANATES;
THERMOELECTRICITY;
ENHANCED PROPERTIES;
FINITE-ELEMENT STUDY;
INSTRUMENTED INDENTATION;
LEAD ZIRCONATE TITANATE THIN FILMS;
NANOMECHANICAL PROPERTY;
PIEZOELECTRIC ENERGY HARVESTING;
PIEZOELECTRIC PROPERTY;
PIEZOELECTRIC RESPONSE;
THIN FILMS;
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EID: 84870702678
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2012.09.036 Document Type: Article |
Times cited : (20)
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References (28)
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