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Volumn 69, Issue , 2005, Pages 213-221
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Determination by indentation method of sputtered PZT films mechanical parameters for Si-MEMs applications
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Author keywords
Elastic modulus; Hardness; MEMS; Nanoindentation; PZT film
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Indexed keywords
ELASTIC MODULI;
GRAIN SIZE AND SHAPE;
INDENTATION;
LEAD COMPOUNDS;
MAGNETRON SPUTTERING;
MICROELECTROMECHANICAL DEVICES;
BIAXIAL ELASTIC MODULUS;
NANOINDENTATION;
PZT FILM;
THIN FILMS;
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EID: 33644786983
PISSN: 10584587
EISSN: 16078489
Source Type: Conference Proceeding
DOI: 10.1080/10584580590898721 Document Type: Conference Paper |
Times cited : (7)
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References (10)
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