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Volumn 69, Issue , 2005, Pages 213-221

Determination by indentation method of sputtered PZT films mechanical parameters for Si-MEMs applications

Author keywords

Elastic modulus; Hardness; MEMS; Nanoindentation; PZT film

Indexed keywords

ELASTIC MODULI; GRAIN SIZE AND SHAPE; INDENTATION; LEAD COMPOUNDS; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES;

EID: 33644786983     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580590898721     Document Type: Conference Paper
Times cited : (7)

References (10)
  • 7
    • 33644752935 scopus 로고    scopus 로고
    • PhD thesis, Univ. Franche Comté
    • O. Guillon, PhD thesis, Univ. Franche Comté (2003).
    • (2003)
    • Guillon, O.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.