Effect of multi-layered bottom electrodes on the orientation of strontium-doped lead zirconate titanate thin films

Thin Solid Films

Volumn 516, Issue 22, 2008, Pages 8101-8105

  Bhaskaran, M ^a   Sriram, S ^a   Mitchell, D R G ^b   Short, K T ^b   Holland, A S ^a  

^a RMIT UNIVERSITY   (Australia)

^b AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

61.10.Nz; 61.50.Ah; 61.68.+n; 68.55.Jk; 77.84.Dy; PSZT thin films; Rhombohedral unit cell; XRD

Indexed keywords

ALKALINE EARTH METALS; CELLS; CYTOLOGY; ELECTROLYSIS; GOLD; MAGNETRON SPUTTERING; METALLIZING; METALS; MOLECULAR BEAM EPITAXY; NONMETALS; OXIDE MINERALS; PARAMETER ESTIMATION; PEROVSKITE; PIEZOELECTRICITY; PLATINUM; PLATINUM METALS; SEMICONDUCTING LEAD COMPOUNDS; SILICON; SOLIDS; STRONTIUM; THICK FILMS; THIN FILMS; X RAY ANALYSIS;

61.10.NZ; 61.50.AH; 61.68.+N; 68.55.JK; 77.84.DY; ADHESION LAYERS; BOTTOM ELECTRODES; CRYSTALLINE ORIENTATIONS; DEPOSITED THIN FILMS; LEAD ZIRCONATE TITANATE; LEAD ZIRCONATE TITANATE THIN FILMS; METAL LAYERS; METAL-COATED; MULTI-LAYER COATINGS; MULTI-LAYERED; PIEZO-ELECTRIC EFFECTS; PSZT THIN FILMS; RELATIVE INTENSITIES; RF-MAGNETRON SPUTTERING; RHOMBOHEDRAL UNIT CELL; UNIT CELLS; UNIT-CELL DIMENSIONS; UNIT-CELL PARAMETERS; X-RAY DIFFRACTION; XRD; XRD ANALYSIS;

X RAY DIFFRACTION ANALYSIS;

EID: 50649125801     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.04.041     Document Type: Article

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