Nanomechanical and dielectric properties of Sol-Gel derived PZT thin films annealed with microwave energy

Integrated Ferroelectrics

Volumn 119, Issue 1, 2010, Pages 13-21

  Rambabu, A ^a   Sudheendran, K ^a   Raju, K C James ^a  

^a UNIVERSITY OF HYDERABAD   (India)

Author keywords

dielectric properties; microwave annealing; nanomechanical properties; PZT thin films; sol gel

Indexed keywords

ANNEALING TEMPERATURES; AVERAGE GRAIN SIZE; CONVENTIONAL METHODS; DIELECTRIC CONSTANTS; DYNAMIC FORCE MICROSCOPY; LEAD ZIRCONIUM TITANATE; LOW-TEMPERATURE CRYSTALLIZATION; MICROMECHANICAL SYSTEMS; MICROWAVE ANNEALING; MICROWAVE ENERGIES; NANOMECHANICAL PROPERTIES; NANOMECHANICAL PROPERTY; PZT; PZT THIN FILM; PZT THIN FILMS; SILICON SUBSTRATES; SPHERICAL GRAINS; UNIFORM MICROSTRUCTURE;

ANNEALING; CERAMIC MATERIALS; DEPOSITION; DIELECTRIC PROPERTIES; GELS; HARDNESS; LEAD; MECHANICAL PROPERTIES; MICROWAVE DEVICES; MICROWAVE HEATING; MICROWAVES; SEMICONDUCTING SILICON COMPOUNDS; SOL-GELS; SOLS; STOVES; THIN FILMS; VAPOR DEPOSITION; ZIRCONIUM;

SOL-GEL PROCESS;

EID: 79952833947     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584587.2010.489495     Document Type: Conference Paper

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