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Scripta Materialia

Volumn 63, Issue 2, 2010, Pages 189-191

Low-temperature deposition of high-response piezoelectric thin films

(3) Sriram, S a Bhaskaran, M a Mitchell, A a

a RMIT UNIVERSITY (Australia)

Author keywords

Crystalline oxides; Electromechanical properties; High resolution electron microscopy; Thin films

Indexed keywords

CRYSTALLINE OXIDES; ELECTROMECHANICAL PROPERTY; GUIDING EFFECT; HIGH RESPONSE; LEAD ZIRCONATE TITANATE; LOW TEMPERATURES; LOW-TEMPERATURE DEPOSITION; MICRO-STRUCTURAL CHARACTERIZATION; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC RESPONSE; PIEZOELECTRIC THIN FILMS; SILICON SUBSTRATES;

CRYSTALLINE MATERIALS; DEPOSITION; PIEZOELECTRICITY; STRONTIUM; STRONTIUM TITANATES; THIN FILMS; VAPOR DEPOSITION;

HIGH RESOLUTION ELECTRON MICROSCOPY;

EID: 77955925741 PISSN: 13596462 EISSN: None Source Type: Journal
DOI: 10.1016/j.scriptamat.2010.03.041 Document Type: Article

Times cited : (10)

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