Design, fabrication, and characterization of a high-heating-efficiency 3-D microheater for catalytic gas sensors

Journal of Microelectromechanical Systems

Volumn 21, Issue 6, 2012, Pages 1402-1409

  Xu, Lei ^a,b,c   Wang, Yuchen ^d   Zhou, Hong ^a   Liu, Yanxiang ^a   Li, Tie ^a   Wang, Yuelin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION   (China)

^d PEKING UNIVERSITY   (China)

Author keywords

3 D microheaters; Anisotropic etching; catalytic gas sensors; concave shaped membrane; power per active area (PPAA); sol gel

Indexed keywords

ACTIVE AREA; COMBUSTION HEAT; FINITE ELEMENT METHOD ANALYSIS; HIGH HEATING EFFICIENCY; LIFT-OFF PROCESS; LOWER EXPLOSIVE LIMITS; MICRO-HEATERS; MICROHEATER; SENSOR RESPONSE;

ANISOTROPIC ETCHING; CATALYSTS; CHEMICAL SENSORS; FINITE ELEMENT METHOD; GAS DETECTORS; HEATING EQUIPMENT; LOADING; METHANE; MICROELECTROMECHANICAL DEVICES; PALLADIUM; PHOTORESISTS; PLATINUM; SOL-GEL PROCESS; SOL-GELS;

THREE DIMENSIONAL;

EID: 84870532413     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2208219     Document Type: Article

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