A novel three-dimensional microheater

IEEE Electron Device Letters

Volumn 32, Issue 9, 2011, Pages 1284-1286

  Xu, Lei ^a,b   Li, Tie ^a   Wang, Yuelin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

3 D; Microheater; photoresist spray coating; power per active area (PPAA)

Indexed keywords

3-D; ACTIVE AREA; BULK SILICON; DIELECTRIC MEMBRANES; LIFT-OFF PROCESS; LOW POWER; MICRO-HEATERS; MICROHEATER; SLENDER BEAMS; THERMAL ISOLATION;

COATINGS; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; PLATINUM; THREE DIMENSIONAL;

HEATING EQUIPMENT;

EID: 80052029649     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2011.2160145     Document Type: Article

References (10)

1. J. S. Suehle, R. E. Cavicchi, M. Gaitan, and S. Semancik, "Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing," IEEE Electron Device Lett., vol. 14, no. 3, pp. 118-120, Mar. 1993.
2. R. E. Cavicchi, J. S. Suehle, K. G. Kreider, M. Gaitan, and P. Chaparala, "Fast temperature programmed sensing for micro-hotplate gas sensors," IEEE Electron Device Lett., vol. 16, no. 6, pp. 286-288, Jun. 1995.
3. M. Y. Afridi, J. S. Suehle, M. E. Zaghloul, D. W. Berning, A. R. Hefner, R. E. Cavicchi, S. Semancik, C. B. Montgomery, and C. J. Taylor, "A monolithic CMOS microhotplate-based gas sensor system," IEEE Sensors J., vol. 2, no. 6, pp. 644-655, Dec. 2002.
4. D. N. Pagonis, G. Kaltsas, and A. G. Nassiopoulou, "Fabrication and testing of an integrated thermal flow sensor employing thermal isolation by a porous silicon membrane over an air cavity," J. Micromech. Microeng., vol. 14, no. 6, pp. 793-797, Jun. 2004.
5. M. Weber, P. Lerch, and P. Renaud, "Improved design for fast modulating IR sources," J. Micromech. Microeng., vol. 7, no. 3, pp. 210-213, Sep. 1997.
6. J. Lee, C. M. Spadaccini, E. V. Mukerjee, and W. P. King, "Differential scanning calorimeter based on suspended membrane single crystal silicon microhotplate," J. Microelectromech. Syst., vol. 17, no. 6, pp. 1513-1525, Dec. 2008.
7. L. Xu, T. Li, X. L. Gao, and Y. L. Wang, "Development of a reliable micro-hotplate with low power consumption," IEEE Sensors J., vol. 11, no. 4, pp. 913-919, Apr. 2011.
8. I. Elmi, S. Zampolli, E. Cozzani, F. Mancarella, and G. C. Cardinali, "Development of ultra-low-power consumption MOX sensors with ppb-level VOC detection capabilities for emerging applications," Sens. Actuators B, Chem., vol. 135, no. 1, pp. 342-351, Dec. 2008.
9. I. Simon, N. Bârsan, M. Bauer, and U. Weimar, "Micromachined metal oxide gas sensors: Opportunities to improve sensor performance," Sens. Actuators B, Chem., vol. 73, no. 1, pp. 1-26, Feb. 2001.
10. S. M. Lee, D. C. Dyer, and J. W. Gardner, "Design and optimization of a high-temperature silicon micro-hotplate for nanoporous palladium pellistors," Microelectron. J., vol. 34, no. 2, pp. 115-126, Feb. 2003.